Analysis of Spherical Carbon Particle Growth in Methane Plasma by Mie-Scattering Ellipsometry.

• Hayashi Yasuaki

  Department of Electronics and Information Science, Kyoto Institute of Technology, Matsugasaki, Sakyo–ku, Kyoto 606

• Tachibana Kunihide

  Department of Electronics and Information Science, Kyoto Institute of Technology, Matsugasaki, Sakyo–ku, Kyoto 606

抄録

The time evolution of polarization state of Mie-scattered light from carbon particles trapped in a methane plasma was measured by a newly developed ellipsometric method. By comparison of the experimental results with a model simulation, it is found that the particles grow by coating with hydrogenated amorphous carbon. It is also found that they have been isotropically and equally coated independent of their initial shape and diameter without homogeneous nucleation and that spherical and monodisperse particles have grown consequently.

収録刊行物

• Japanese Journal of Applied Physics

  Japanese Journal of Applied Physics 33 (7B), 4208-4211, 1994

  The Japan Society of Applied Physics

キーワード

• Mie scattering
• ellipsometry
• in-process monitoring
• carbon particles
• amorphous carbon

詳細情報

• CRID: 1390001206247147520
• NII論文ID: 210000035727
• NII論文ID: 30021820286
• NII論文ID: 130004520431
• NII書誌ID: AA10457675
• DOI: 10.1143/jjap.33.4208
• COI: 1:CAS:528:DyaK2cXmtF2hs7c%3D
• ISSN: 13474065
• ISSN: 00214922
• Web Site: https://iopscience.iop.org/article/10.1143/JJAP.33.4208
• Web Site: https://iopscience.iop.org/article/10.1143/JJAP.33.4208/pdf
• 本文言語コード: en
• データソース種別:
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• 抄録ライセンスフラグ: 使用不可