Simulation and Fabrication Process for a Medical Phased Array Ultrasonic Probe using a 0.91Pb(Zn_1/3Nb_2/3)O₃–0.09PbTiO₃ Single Crystal

• Saitoh Shiroh

  Materials and Devices Research Laboratories, Research and Development Center, Toshiba Corporation, Kawasaki 210–8582, Japan

• Kobayashi Tsuyoshi

  Materials and Devices Research Laboratories, Research and Development Center, Toshiba Corporation, Kawasaki 210–8582, Japan

• Harada Kouichi

  Materials and Devices Research Laboratories, Research and Development Center, Toshiba Corporation, Kawasaki 210–8582, Japan

• Shimanuki Senji

  Materials and Devices Research Laboratories, Research and Development Center, Toshiba Corporation, Kawasaki 210–8582, Japan

• Yamashita Yohachi

  Materials and Devices Research Laboratories, Research and Development Center, Toshiba Corporation, Kawasaki 210–8582, Japan

書誌事項

タイトル別名

• Simulation and Fabrication Process for a Medical Phased Array Ultrasonic Probe using a 0.91Pb(Zn1/3Nb2/3)O3-0.09PbTiO3 Single Crystal.

抄録

Medical array ultrasonic probes using a 0.91Pb(Zn_1/3Nb_2/3)O₃-0.09PbTiO₃ (PZN-PT) single crystal exhibiting a high electromechanical coupling factor (k₃₃) >90% have been studied in order to realize both a higher sensitivity and broader bandwidth properties. Pulse echo characteristics of the array probes, each transducer of which has dimensions of 6.0 mm× 0.14 mm with a center frequency of 3.5 MHz, are simulated using the dielectric and the piezoelectric constants of the grown PZN-PT single crystals. Simulated echo amplitudes of the PZN-PT probes have been improved by as much as 7 dB compared with those of the conventional Pb(Zr_1-x, Ti_x)O₃ (PZT) ceramic ones. Moreover, the bandwidth of the PZN-PT probe is expected to be about 25% broader than those of the conventional PZT probes. It has been shown by simulation that the low acoustic impedance as well as the high coupling factor of the PZN-PT crystal contribute in broadening the bandwidth of the probe. The fabrication process of the array probe was investigated. A conventional method in which the dicing conditions are optimized and a novel dicing process are proposed.

収録刊行物

• Japanese Journal of Applied Physics

  Japanese Journal of Applied Physics 37 (5B), 3053-3057, 1998

  The Japan Society of Applied Physics

キーワード

• medical array ultrasonic probe
• PZN-PT single crystal
• simulation
• fabrication process
• sensitivity
• bandwidth

詳細情報

• CRID: 1390001206247737856
• NII論文ID: 110003947418
• NII論文ID: 210000043216
• NII論文ID: 30021830923
• NII論文ID: 130004525103
• NII書誌ID: AA10457675
• DOI: 10.1143/jjap.37.3053
• ISSN: 13474065
• ISSN: 00214922
• NDL書誌ID: 4642026
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I4642026
• Web Site: https://iopscience.iop.org/article/10.1143/JJAP.37.3053
• Web Site: https://iopscience.iop.org/article/10.1143/JJAP.37.3053/pdf
• 本文言語コード: en
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