Effect of Nitrogen on Electrical and Physical Properties of Polyatomic Layer Chemical Vapor Deposition HfSi<sub><i>x</i></sub>O<sub><i>y</i></sub>Gate Dielectrics
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- Punchaipetch Prakaipetch
- Graduate School of Materials Science, Nara Institute of Science and Technology
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- Okamoto Takeshi
- Graduate School of Materials Science, Nara Institute of Science and Technology
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- Nakamura Hideki
- Graduate School of Materials Science, Nara Institute of Science and Technology
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- Uraoka Yukiharu
- Graduate School of Materials Science, Nara Institute of Science and Technology
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- Fuyuki Takashi
- Graduate School of Materials Science, Nara Institute of Science and Technology
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- Horii Sadayoshi
- Semiconductor Equipment System Laboratory, Hitachi Kokusai Electric Inc.
書誌事項
- タイトル別名
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- Effect of Nitrogen on Electrical and Physical Properties of Polyatomic Layer Chemical Vapor Deposition HfSixOy Gate Dielectrics
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The effect of nitrogen incorporation on polyatomic layer chemical vapor deposition (PLCVD) hafnium silicate (HfSixOy) films was investigated. The physical and electrical properties of nitride hafnium silicate (HfSixOyNz) and HfSixOy dielectric films are reported. X-ray photoelectron spectroscopy (XPS) was used to check chemical compositions, nitrogen profile, band gap, and band offset of the HfSixOy and HfSixOyNz films. The nitrogen incorporation results in decreases in the band gap and band offset of the HfSixOy sample. The nitrogen profile obtained by secondary ion mass spectroscopy (SIMS) shows a gradient decrease from the surface to the interface. The prepared HfSixOy and HfSixOyNz films have reasonable electrical performance.
収録刊行物
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- Japanese Journal of Applied Physics
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Japanese Journal of Applied Physics 43 (11B), 7815-7820, 2004
The Japan Society of Applied Physics
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詳細情報 詳細情報について
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- CRID
- 1390282681242200576
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- NII論文ID
- 10014214974
- 30021853830
- 130004531553
- 210000056724
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- NII書誌ID
- AA10457675
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- ISSN
- 13474065
- 00214922
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- NDL書誌ID
- 7179939
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- 本文言語コード
- en
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- データソース種別
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- JaLC
- NDL
- Crossref
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- 抄録ライセンスフラグ
- 使用不可