Sub-100 nm-Resolution Grazing Incidence Soft X-Ray Microscope with a Laser-Produced Plasma Source

• Sadao Aoki

• Taro Ogata

• Shuuzou Sudo

• Tetsuji Onuki

抄録

A high-resolution soft X-ray microscope was constructed using grazing incidence mirrors and a laser-produced plasma source. An Nd-YAG pulse laser (1.064 µm) was focused onto an aluminum target to produce soft X-rays above 4 nm in wavelength. The beam energy of the laser was 1.4 J, with a pulse width of 8 ns. The Wolter type-I mirror was used as an objective mirror and the toroidal mirror as a condenser. The magnification of the objective was 20. A holographic plate was used as a detector. Resolution of about 40 nm was achieved with a single shot.

収録刊行物

• Japanese Journal of Applied Physics

  Japanese Journal of Applied Physics 31 (10R), 3477-, 1992-10-01

  IOP Publishing

キーワード

• General Physics and Astronomy
• General Engineering

詳細情報

• CRID: 1360003446841377792
• NII論文ID: 30021862097
• NII論文ID: 210000032343
• NII書誌ID: AA10457675
• DOI: 10.1143/jjap.31.3477
• ISSN: 13474065
• ISSN: 00214922
• Web Site: https://iopscience.iop.org/article/10.1143/JJAP.31.3477
• Web Site: https://iopscience.iop.org/article/10.1143/JJAP.31.3477/pdf
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