Multichannel 5×5-Site 3-Dimensional Si Microprobe Electrode Array for Neural Activity Recording System

• Kawano Takeshi

  Department of Electrical and Electronic Engineering, Toyohashi University of Technology

• Takao Hidekuni

  Department of Electrical and Electronic Engineering, Toyohashi University of Technology

• Sawada Kazuaki

  Department of Electrical and Electronic Engineering, Toyohashi University of Technology

• Ishida Makoto

  Department of Electrical and Electronic Engineering, Toyohashi University of Technology

書誌事項

タイトル別名

• Multichannel 5*5-Site 3-Dimensional Si Microprobe Electrode Array for Neural Activity Recording System
• Multichannel 5×5-site 3-dimensional Si micro-probe electrode array for neural activity recording

抄録

Multichannel 5×5-site Si microprobe electrode array has been developed for neural activity recording. Si microprobes were fabricated successfully at predetermined sites on a chip using Au dots and Si₂H₆ gas source molecular beam epitaxy (GS-MBE), a method based on vapor-liquid-solid (VLS) growth. Selective VLS Si growth allowed the design of three-dimensional (3D) microprobes with 40 μm spacing in a 5×5 array. The diameter and the length of the Si probe can be widely changed by changing the Au dot size and the Si growth time, respectively. In addition, the circular-cone-shaped Si probe has a shape suitable for penetration into neural tissues, and can be realized by increasing growth pressure. The mechanical strength of the Si probe was evaluated with observation of its bending and penetration into a gelatin membrane, which indicated that the Si probes are strong enough to withstand the application. Signal recording with the same amplitude as neural activity was also performed using the fabricated Si probe array chip. These results confirm that high-density neural signals from neural tissues can be obtained with the multichannel 3D VLS Si microprobe array chip.

収録刊行物

• Japanese Journal of Applied Physics

  Japanese Journal of Applied Physics 42 (4B), 2473-2477, 2003

  The Japan Society of Applied Physics

キーワード

• multielectrode array
• vapor-liquid-solid growth
• microelectrode
• neural probe
• neural interface

詳細情報

• CRID: 1390001206254841728
• NII論文ID: 130004530724
• NII論文ID: 10010802243
• NII論文ID: 30021865205
• NII論文ID: 210000053340
• NII書誌ID: AA10457675
• DOI: 10.1143/jjap.42.2473
• ISSN: 13474065
• ISSN: 00214922
• NDL書誌ID: 6524139
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I6524139
• Web Site: http://stacks.iop.org/1347-4065/42/i=4S/a=2473/pdf
• 本文言語コード: en
• データソース種別:
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  • NDL
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• 抄録ライセンスフラグ: 使用不可