Transmission electron microscopy observation and optical property of sol-gel derived LiNbO<sub>3</sub> films

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<jats:p>Crystallization behavior, defects, and interface structures of sol-gel derived LiNbO<jats:sub>3</jats:sub> films on three kinds of substrates were examined. The nucleation was found to occur epitaxially at the interface between the film and the substrate. The continuous film is formed by coalescence of the island-like crystallites. When sapphire substrate is used, which has large lattice mismatch with the LiNbO<jats:sub>3</jats:sub>, the resulting film contains a large amount of micropores, twin structures, and misfit dislocations. On the other hand, while LiTaO<jats:sub>3</jats:sub> and 5% MgO-doped LiNbO<jats:sub>3</jats:sub> substrates with smaller mismatch are used as substrates, the films show no evidence of the formation of dislocations and twins. The film on 5% MgO-doped LiNbO<jats:sub>3</jats:sub> substrate shows better optical waveguiding property.</jats:p>

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