Plasma-enhanced-polymerization thin-film as a drift barrier for Cu ions

• Takenobu Yoshino

• Nobuhiro Hata

• Jun Kawahara

書誌事項

タイトル別名

• Plasma enhanced polymerization thin film as a drift barrier for Cu ions
• Special issue: Solid state devices and materials
• Special issue Solid state devices and materials

収録刊行物

• Japanese journal of applied physics. Part. 1, Regular papers, brief communications & review papers : JJAP

  Japanese journal of applied physics. Part. 1, Regular papers, brief communications & review papers : JJAP 46 (4B), 1951-1954, 2007-04

  Tokyo : Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physics

キーワード

• Cu ion drift
• benzocyclobutene
• BCB
• drift barrier
• time-dependent dielectric breakdown
• TDDB

詳細情報

• CRID: 1520853833156991488
• NII論文ID: 40015348967
• NII書誌ID: AA10457675
• ISSN: 00214922
• ISSN: 13474065
• DOI: 10.1143/jjap.46.1951
• NDL書誌ID: 8718472
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I8718472
• Web Site: https://iopscience.iop.org/article/10.1143/JJAP.46.1951
• Web Site: https://iopscience.iop.org/article/10.1143/JJAP.46.1951/pdf
• 本文言語コード: en
• NDL 雑誌分類:
  • ZM35(科学技術--物理学)
• データソース種別:
  • NDL
  • Crossref
  • CiNii Articles