Enlargement of crystal grains in thin silicon films by continuous-wave laser irradiation

• Shuntaro Fujii

• Shin-Ichiro Kuroki

• Koji Kotani

書誌事項

タイトル別名

• Enlargement of crystal grains in thin silicon films by continuous wave laser irradiation
• Special issue: Solid state devices and materials
• Special issue Solid state devices and materials

収録刊行物

• Japanese journal of applied physics. Part. 1, Regular papers, brief communications & review papers : JJAP

  Japanese journal of applied physics. Part. 1, Regular papers, brief communications & review papers : JJAP 46 (4B), 2501-2504, 2007-04

  Tokyo : Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physics

キーワード

• polycrystalline Si
• recrystallization
• cw laser

詳細情報

• CRID: 1520290883030713856
• NII論文ID: 40015349086
• NII書誌ID: AA10457675
• ISSN: 00214922
• ISSN: 13474065
• ISSN: http://id.crossref.org/issn/13474065
• DOI: 10.1143/jjap.46.2501
• NDL書誌ID: 8720222
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I8720222
• Web Site: https://iopscience.iop.org/article/10.1143/JJAP.46.2501
• Web Site: https://iopscience.iop.org/article/10.1143/JJAP.46.2501/pdf
• 本文言語コード: en
• NDL 雑誌分類:
  • ZM35(科学技術--物理学)
• データソース種別:
  • NDL
  • Crossref
  • CiNii Articles