Decomposition of CF4 Using Pulsed-Electron-Beam-Generated Atmospheric-Pressure Low-Temperature Plasmas

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Author(s)

    • Okuda Isao Okuda Isao
    • Energy Technology Research Institute, National Institute of Advanced Industrial Science and Technology, Tsukuba, Ibaraki 305-8568, Japan
    • Kato Susumu [他] Kato Susumu
    • Energy Technology Research Institute, National Institute of Advanced Industrial Science and Technology, Tsukuba, Ibaraki 305-8568, Japan
    • Matsumoto Yuji
    • Energy Technology Research Institute, National Institute of Advanced Industrial Science and Technology, Tsukuba, Ibaraki 305-8568, Japan

Abstract

Decomposition of CF4 in an atmospheric-pressure argon-base gas mixture under moisture-saturated conditions (CF4 1000 ppm, 130 kPa) is demonstrated using pulsed-electron-beam-generated low-temperature plasmas. A relatively high destruction and removal efficiency (DRE 90% at 6 J/cm3) was obtained compared with those obtained using discharge-generated plasmas. These results are attributed to enhanced decomposition of CF4 by argon ions or excited argon species that can be efficiently generated using high-energy electron beams. Methods of scavenging the reactive intermediates from the plasma are also experimentally evaluated to increase the DRE of CF4 decomposition and discussed with regard to practical abatement devices.

Journal

  • Jpn J Appl Phys

    Jpn J Appl Phys 47(7), 5681-5683, 2008-07-25

    INSTITUTE OF PURE AND APPLIED PHYSICS

Cited by:  6

Codes

  • NII Article ID (NAID)
    40016161819
  • Text Lang
    EN
  • Article Type
    Journal Article
  • Journal Type
    大学紀要
  • ISSN
    0021-4922
  • NDL Article ID
    9586193
  • NDL Source Classification
    ZM35(科学技術--物理学)
  • NDL Call No.
    Z53-A375
  • Data Source
    CJPref  NDL  JSAP  Crossref 
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