Decomposition of CF4 Using Pulsed-Electron-Beam-Generated Atmospheric-Pressure Low-Temperature Plasmas
Access this Article
Search this Article
Decomposition of CF4 in an atmospheric-pressure argon-base gas mixture under moisture-saturated conditions (CF4 1000 ppm, 130 kPa) is demonstrated using pulsed-electron-beam-generated low-temperature plasmas. A relatively high destruction and removal efficiency (DRE 90% at 6 J/cm3) was obtained compared with those obtained using discharge-generated plasmas. These results are attributed to enhanced decomposition of CF4 by argon ions or excited argon species that can be efficiently generated using high-energy electron beams. Methods of scavenging the reactive intermediates from the plasma are also experimentally evaluated to increase the DRE of CF4 decomposition and discussed with regard to practical abatement devices.
- Jpn J Appl Phys
Jpn J Appl Phys 47(7), 5681-5683, 2008-07-25
INSTITUTE OF PURE AND APPLIED PHYSICS