Semianalytical finite element method model for radio frequency sheaths in single- and dual-frequency capacitively coupled plasmas

• Kazuki Denpoh

• Tatsuru Shirafuji

Bibliographic Information

Other Title

• Semianalytical finite element method model for radio frequency sheaths in single and dual frequency capacitively coupled plasmas

Abstract

コレクション : 国立国会図書館デジタルコレクション > デジタル化資料 > 雑誌

Journal

• Japanese journal of applied physics : JJAP

  Japanese journal of applied physics : JJAP 48 (9), 090209-, 2009-09

  Tokyo : The Japan Society of Applied Physics

Keywords

• General Physics and Astronomy
• Physics and Astronomy (miscellaneous)
• General Engineering

Details

• CRID: 1520853833338664960
• NII Article ID: 40016742985
• NII Book ID: AA12295836
• ISSN: 00214922
• ISSN: 13474065
• ISSN: http://id.crossref.org/issn/13474065
• DOI: 10.1143/jjap.48.090209
• NDL BIB ID: 10365394
• Web Site: http://id.ndl.go.jp/bib/10365394
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I10365394
• Text Lang: en
• NDL Source Classification:
  • ZM35(科学技術--物理学)
• Data Source:
  • NDL
  • Crossref
  • CiNii Articles