Characterization of low-k/Cu damascene structures using monoenergetic positron beams

• Akira Uedono

• Naoya Inoue

• Yoshihiro Hayashi

Bibliographic Information

Other Title

• Characterization of low k Cu damascene structures using monoenergetic positron beams

Abstract

コレクション : 国立国会図書館デジタルコレクション > デジタル化資料 > 雑誌

Journal

• Japanese journal of applied physics : JJAP

  Japanese journal of applied physics : JJAP 48 (12), 120222-, 2009-12

  Tokyo : The Japan Society of Applied Physics

Keywords

• General Physics and Astronomy
• Physics and Astronomy (miscellaneous)
• General Engineering

Details

• CRID: 1520853832698640768
• NII Article ID: 40016890464
• NII Book ID: AA12295836
• ISSN: 00214922
• ISSN: 13474065
• DOI: 10.1143/jjap.48.120222
• NDL BIB ID: 10486414
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I10486414
• Text Lang: en
• NDL Source Classification:
  • ZM35(科学技術--物理学)
• Data Source:
  • NDL
  • Crossref
  • CiNii Articles