Lateral junction waveguide-type photodiode grown on semi-insulating InP substrate

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  • Lateral junction waveguide type photodiode grown on semi insulating InP substrate

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<jats:p> A lateral junction waveguide-type GaInAsP/InP photodetector was fabricated on a semi-insulating InP substrate by two-step organometallic vapor-phase epitaxy (OMVPE) regrowth. Responsivities of 0.9 A/W at 1500 nm and 0.27 A/W at 1550 nm were obtained. A 3-dB bandwidth of 6 GHz and 6-Gbps error-free operation under non-bias conditions were achieved with a stripe width of 1.4 µm and a device length of 220 µm. </jats:p>

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