Diffuser micropump structured with extremely flexible diaphragm of 2-μm-thick polyimide film

• Yingwei Liu

• Hiroki Komatsuzaki

• Zongfan Duan

書誌事項

タイトル別名

• Diffuser micropump structured with extremely flexible diaphragm of 2 mm thick polyimide film
• Special issue: Solid state devices and materials
• Special issue Solid state devices and materials

収録刊行物

• Japanese journal of applied physics : JJAP

  Japanese journal of applied physics : JJAP 50 (4), 2011-04

  Tokyo : The Japan Society of Applied Physics

詳細情報

• CRID: 1520009408981782400
• NII論文ID: 40018801046
• NII書誌ID: AA12295836
• ISSN: 00214922
• NDL書誌ID: 11077571
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I11077571
• 本文言語コード: en
• NDL 雑誌分類:
  • ZM35(科学技術--物理学)
• データソース種別:
  • NDL
  • CiNii Articles