Formation of Silicon-on-Nothing Structures with Extremely Flat Surfaces

• Koichi Sudoh

• Jun Nakamura

• Muneyuki Naito

書誌事項

タイトル別名

• Crystal growth, surfaces, interfaces, thin films, and bulk materials

収録刊行物

• Japanese journal of applied physics : JJAP

  Japanese journal of applied physics : JJAP 52 (7), 2013-07

  Tokyo : The Japan Society of Applied Physics

詳細情報

• CRID: 1520290882171087872
• NII論文ID: 40019747458
• NII書誌ID: AA12295836
• ISSN: 00214922
• NDL書誌ID: 024766877
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I024766877
• 本文言語コード: en
• NDL 雑誌分類:
  • ZM35(科学技術--物理学)
• データソース種別:
  • NDL
  • CiNii Articles