Solvent Design Methodology to Recycle Chamber Parts and Recover Platinum by Highly Selective Wet Treatment for Ni-Pt Sputtering System

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Journal

  • Japanese journal of applied physics : JJAP

    Japanese journal of applied physics : JJAP 52(11), 116505-1-5, 2013-11

    The Japan Society of Applied Physics

Codes

  • NII Article ID (NAID)
    40019883594
  • NII NACSIS-CAT ID (NCID)
    AA12295836
  • Text Lang
    ENG
  • Journal Type
    大学紀要
  • ISSN
    0021-4922
  • NDL Article ID
    025033697
  • NDL Call No.
    Z53-A375
  • Data Source
    NDL 
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