In situ Photocurrent Measurements of Thin-Film Semiconductors during Plasma-Enhanced Chemical Vapor Deposition

• Shota Nunomura

• Isao Sakata

• Michio Kondo

収録刊行物

• Applied physics express : APEX

  Applied physics express : APEX 6 (12), 126201-, 2013-12

  Tokyo : Japan Society of Applied Physics

キーワード

• General Physics and Astronomy
• General Engineering

詳細情報

• CRID: 1522543655879915648
• NII論文ID: 40019923411
• NII書誌ID: AA12295133
• ISSN: 18820778
• ISSN: 18820786
• ISSN: http://id.crossref.org/issn/18820786
• DOI: 10.7567/apex.6.126201
• NDL書誌ID: 025108642
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I025108642
• Web Site: http://stacks.iop.org/1882-0786/6/i=12/a=126201/pdf
• 本文言語コード: en
• NDL 雑誌分類:
  • ZM35(科学技術--物理学)
• データソース種別:
  • NDL
  • Crossref
  • CiNii Articles
  • KAKEN