Influence of Polarization Plane on Groove Shape in Scribing of Sapphire by THG : YAG Laser

• Okamoto Yasuhiro

  Okayama University

• Nakashiba Shin-ichi

  Kataoka Corporation

• Sakagawa Tomokazu

  Kataoka Corporation

• Okada Akira

  Okayama University

• Uno Yoshiyuki

  Chugoku Polytechnic College

抄録

 Scribing characteristics of sapphire by using THG:YAG laser were experimentally investigated. The influence of polarization plane of laser beam on the curved shape at the tip of groove was also discussed. The absorptivity of laser beam at a high pulse repetition rate was still kept at higher order, although the feed rate became high. Therefore, a high pulse repetition rate condition is very effective for laser scribing of sapphire. The curved shape at the tip of groove was greatly influenced by the direction of polarization plane of laser beam. This phenomenon occurred not randomly but regularly depending on the angle of polarization plane. The laser beam was strongly reflected in the direction of curved shape generation, in other words, in the perpendicular direction to the polarization plane of laser beam. Therefore, a suitable setting of polarization plane could make a straight groove without the occurrence of curved shape.

収録刊行物

• International Journal of Electrical Machining

  International Journal of Electrical Machining 18 (0), 49-54, 2013

  一般社団法人 電気加工学会

キーワード

• scribing
• sapphire
• groove shape
• polarization
• THG:YAG laser

詳細情報

• CRID: 1390282680733193600
• NII論文ID: 130005395691
• NII論文ID: 40021342661
• NII書誌ID: AN10564586
• DOI: 10.2526/ijem.18.49
• ISSN: 21885117
• ISSN: 13417908
• NDL書誌ID: 028573011
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I028573011
• Web Site: https://www.jstage.jst.go.jp/article/ijem/18/0/18_49/_pdf
• 本文言語コード: en
• データソース種別:
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  • NDL
  • Crossref
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