Structure and properties of a-Si : H films prepared at high-deposition rate 高速堆積a-Si : H膜の構造と特性
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Bibliographic Information
- Title
-
Structure and properties of a-Si : H films prepared at high-deposition rate
- Other Title
-
高速堆積a-Si : H膜の構造と特性
- Author
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上田, 将人
- Author(Another name)
-
ウエダ, マサト
- University
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広島大学
- Types of degree
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工学博士
- Grant ID
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甲第637号
- Degree year
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1987-03-24
Note and Description
博士論文
Table of Contents
- 目次 (7コマ目)