Nitrided oxides prepared by rapid thermal processing and applications to submicrometer MOSFET's 急速加熱形成による窒化二酸化珪素膜とその微細MOSトランジスタへの応用に関する研究
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著者
書誌事項
- タイトル
-
Nitrided oxides prepared by rapid thermal processing and applications to submicrometer MOSFET's
- タイトル別名
-
急速加熱形成による窒化二酸化珪素膜とその微細MOSトランジスタへの応用に関する研究
- 著者名
-
堀, 隆
- 著者別名
-
ホリ, タカシ
- 学位授与大学
-
京都大学
- 取得学位
-
工学博士
- 学位授与番号
-
乙第7396号
- 学位授与年月日
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1991-01-23
注記・抄録
博士論文
目次
- 論文目録 / (0001.jp2)
- Contents / (0004.jp2)
- 1.Introduction / p1 (0005.jp2)
- References / p7 (0008.jp2)
- 2.Scaling and Thin Insulators / p9 (0009.jp2)
- 2-1.Introduction / p10 (0010.jp2)
- 2-2.Scaling Law of Silicon MOSFET's / p10 (0010.jp2)
- 2-3.Scaling Limitations of MOS Technologies / p14 (0012.jp2)
- 2-4.Rapid Thermal Processing (RTP) for Gate Dielectrics / p19 (0014.jp2)
- 2-5.Summary / p27 (0018.jp2)
- References / p28 (0019.jp2)
- 3.Physical Properties of Nitrided Oxides / p30 (0020.jp2)
- 3-1.Introduction / p31 (0020.jp2)
- 3-2.Sample Preparation / p32 (0021.jp2)
- 3-3.AES Analyses of Compositions / p34 (0022.jp2)
- 3-4.SIMS Analyses of Hydrogen Contents / p48 (0029.jp2)
- 3-5.XPS Analyses / p52 (0031.jp2)
- 3-6.TEM Observations / p56 (0033.jp2)
- 3-7.Discussion / p58 (0034.jp2)
- 3-8.Summary / p61 (0035.jp2)
- References / p63 (0036.jp2)
- 4.Initial Electrical Properties of Nitrided Oxides / p65 (0037.jp2)
- 4-1.Introduction / p66 (0038.jp2)
- 4-2.Experimental / p67 (0038.jp2)
- 4-3.Fixed Charges and Interface States of Nitrided Oxides / p68 (0039.jp2)
- 4-4.A Model for Initial Electrical Properties / p76 (0043.jp2)
- 4-5.Initial Electrical Properties of Reoxidized Nitrided Oxides / p83 (0046.jp2)
- 4-6.Summary / p88 (0049.jp2)
- Appendix / p90 (0050.jp2)
- References / p91 (0050.jp2)
- 5.Charge-Trapping Properties of Nitrided Oxides / p93 (0051.jp2)
- 5-1.Introduction / p94 (0052.jp2)
- 5-2.Experimental / p96 (0053.jp2)
- 5-3.Electron Trapping and Interface-State Generation of Nitrided Oxides / p98 (0054.jp2)
- 5-4.Charge-Trapping Properties of Reoxidized Nitrided Oxides / p102 (0056.jp2)
- 5-5.Models for Charge-Trapping Properties / p108 (0059.jp2)
- 5-6.Summary / p120 (0065.jp2)
- Appendix / p122 (0066.jp2)
- References / p123 (0066.jp2)
- 6.Applications of Nitrided Oxides to Submicrometer MOSFET's / p126 (0068.jp2)
- 6-1.MOSFET Performance of Nitrided Oxides / p127 (0068.jp2)
- 6-2.Hot-Carrier Effects in MOSFET's with Nitrided Oxides / p136 (0073.jp2)
- 6-3.Application to MOSFET's with Polycide Gate Electrodes / p144 (0077.jp2)
- References / p150 (0080.jp2)
- 7.Conclusions / p152 (0081.jp2)
- Acknowledgment / p157 (0083.jp2)
- Paper List / p158 (0084.jp2)