Studies on high density nonvolatile semiconductor memory devices 高密度不揮発性半導体メモリデバイスに関する研究
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Bibliographic Information
- Title
-
Studies on high density nonvolatile semiconductor memory devices
- Other Title
-
高密度不揮発性半導体メモリデバイスに関する研究
- Author
-
野澤, 博
- Author(Another name)
-
ノザワ, ヒロシ
- University
-
京都大学
- Types of degree
-
工学博士
- Grant ID
-
乙第7466号
- Degree year
-
1991-03-23
Note and Description
博士論文
Table of Contents
- 論文目録 / (0001.jp2)
- Table of contents / (0004.jp2)
- Introduction / p1 (0006.jp2)
- §1.Development of Nonvolatile Memory Device / p7 (0009.jp2)
- 1.1 Introduction / p7 (0009.jp2)
- 1.2 Concept / p8 (0010.jp2)
- 1.3 Device Structure and Modelings / p10 (0011.jp2)
- 1.4 Process Technology / p16 (0014.jp2)
- 1.5 Application / p21 (0016.jp2)
- §2.Current Understanding of the Nonvolatile Memory Operation / p25 (0018.jp2)
- 2.1 Introduction / p25 (0018.jp2)
- 2.2 P-channel SAMOS / p25 (0018.jp2)
- 2.3 N-channel SAMOS / p30 (0021.jp2)
- 2.4 EEPROM / p34 (0023.jp2)
- 2.5 U.V.Erase / p37 (0024.jp2)
- 2.6 Memory Array / p39 (0025.jp2)
- 2.7 Conclusion / p41 (0026.jp2)
- §3.A Thermionic Electron Emission Model for Charge Retention in SAMOS Structures / p43 (0027.jp2)
- 3.1 Introduction / p43 (0027.jp2)
- 3.2 Modeling / p44 (0028.jp2)
- 3.3 Experimental Results / p44 (0028.jp2)
- 3.4 Conclusions / p49 (0030.jp2)
- Appendix / p51 (0031.jp2)
- §4.Selective Polysilicon Oxidation Technology for VLSI Isolation / p53 (0032.jp2)
- 4.1 Introduction / p53 (0032.jp2)
- 4.2 SelectiveOxidation Technology / p55 (0033.jp2)
- 4.3 Experiments / p58 (0035.jp2)
- 4.4 Experimental Results / p60 (0036.jp2)
- 4.5 Discussion / p65 (0038.jp2)
- 4.6 Conclusion / p69 (0040.jp2)
- §5.Characteristics and Reliability of the SEPROM Cell / p71 (0041.jp2)
- 5.1 Introduction / p71 (0041.jp2)
- 5.2 SEPROM Process / p73 (0042.jp2)
- 5.3 Experimental Results and Analysis / p75 (0043.jp2)
- 5.4 Discussions / p87 (0049.jp2)
- 5.5 Conclusion / p90 (0051.jp2)
- §6.An EEPROM Cell Using a Low Barrier Height Tunnel Oxide / p93 (0052.jp2)
- 6.1 Introduction / p93 (0052.jp2)
- 6.2 Sample Preparation and Measurement / p94 (0053.jp2)
- 6.3 Experimental Results / p98 (0055.jp2)
- 6.4 Discussion / p107 (0059.jp2)
- 6.5 Conclusion / p110 (0061.jp2)
- §7.Summary / p113 (0062.jp2)
- References / p121 (0066.jp2)
- List of Figures / p131 (0071.jp2)
- Publications / p137 (0074.jp2)