Excited-plasma synthesis of fluorine- and silicon-containing organic thin films for surface science 含フッ素系および含ケイ素系有機薄膜の励起プラズマによる合成とその表面物性

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著者

    • 杉本, 岩雄 スギモト, イワオ

書誌事項

タイトル

Excited-plasma synthesis of fluorine- and silicon-containing organic thin films for surface science

タイトル別名

含フッ素系および含ケイ素系有機薄膜の励起プラズマによる合成とその表面物性

著者名

杉本, 岩雄

著者別名

スギモト, イワオ

学位授与大学

京都大学

取得学位

工学博士

学位授与番号

乙第7686号

学位授与年月日

1991-11-25

注記・抄録

博士論文

目次

  1. 論文目録 / (0001.jp2)
  2. CONTENTS / (0007.jp2)
  3. General Introduction / p1 (0009.jp2)
  4. Part I Plasma-Synthesis and Properties of Fluorine-Containing Organic Thin Films / p20 (0019.jp2)
  5. Chapter1 Optical Emission Studies on Interaction between Halogenated Carbon Species and Noble Gas during Fluoropolymer Sputtering / p21 (0019.jp2)
  6. Chapter2 Magnetic Condensation of a Photo-Excited Plasma during Fluoropolymer Sputtering / p48 (0033.jp2)
  7. Chapter3 Characterization of Fluoropolymer Thin-Film Synthesized in Photo-Excited Radio-Frequency Plasma / p74 (0046.jp2)
  8. Chapter4 Ultraviolet-Light Irradiation of a Radio-Frequency Plasma Applied to Fluoropolymer Sputtering Deposition / p107 (0062.jp2)
  9. Chapter5 Solid Lubricating Fluorine-Containing Polymer Film Synthesized by Perf1uoropolyether Sputtering / p133 (0075.jp2)
  10. Chapter6 Surface Micro-Analytical Study on the Tribological Interface between the Sputtered Fluoropolymer Film and a Sliding Ball / p151 (0084.jp2)
  11. Chapter7 High Lubrication Performance of Tribologically Oriented Fluoropolymer Molecules Analyzed by Polarized Infrared Microspectroscopy / p184 (0101.jp2)
  12. Chapter8 Tribological Behavior of C-F Bonds in Plasma-Synthesized Fluoropolymers Analyzed by Polarized Infrared Microspectroscopy / p212 (0115.jp2)
  13. Chapter9 Plasma-Synthesized Fluoropolymer Films for Molecular Sensing / p231 (0124.jp2)
  14. Part II Plasma-Synthesis and Properties of Silicon-Containing Organic Thin Films / p244 (0131.jp2)
  15. Chapter1 Lubricating Performance Enhancement of Amorphous Silicon Carbide Film by Annealing Effect and Microbeam Analyses of the Tribological Interface / p245 (0131.jp2)
  16. Chapter2 Oriented Hydrocarbons Transferred from High-Performance Lubricative Amorphous-C:H:Si Film during Sliding in a Vacuum / p281 (0149.jp2)
  17. Chapter3 Amorphous-C:Si:F(Cl):Na Film with Metal-Like Conductivity / p293 (0155.jp2)
  18. General Conclusion / p316 (0167.jp2)
  19. Publication List / p321 (0169.jp2)
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各種コード

  • NII論文ID(NAID)
    500000080877
  • NII著者ID(NRID)
    • 8000000081084
  • DOI(NDL)
  • NDL書誌ID
    • 000000245191
  • データ提供元
    • NDL ONLINE
    • NDLデジタルコレクション
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