Growth processes and fundamental properties of amorphous semiconductor superlattices of a-Ge:H/a-Genx & a-Si:H/a-Sinx アモルファス半導体超格子の作成と基礎物性
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著者
書誌事項
- タイトル
-
Growth processes and fundamental properties of amorphous semiconductor superlattices of a-Ge:H/a-Genx & a-Si:H/a-Sinx
- タイトル別名
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アモルファス半導体超格子の作成と基礎物性
- 著者名
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本間, 格
- 著者別名
-
ホンマ, イタル
- 学位授与大学
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東京大学
- 取得学位
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工学博士
- 学位授与番号
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乙第9746号
- 学位授与年月日
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1990-06-14
注記・抄録
博士論文
目次
- PROLOGUE / p1 (0003.jp2)
- ACKNOWLEDGEMENT / p4 (0006.jp2)
- List of Publications / p6 (0008.jp2)
- Contents / p9 (0011.jp2)
- Chapter I.Introduction / p12 (0014.jp2)
- 1-1 Background of This Research / p12 (0014.jp2)
- 1-2 The Current Technological Issues of the Amorphous Semiconductor Superlattices / p17 (0019.jp2)
- 1-3 The Scientific Significance of This Research in the field of Amorphous Semiconductor Materials / p20 (0022.jp2)
- Chapter II Properties of Hydrogenated Amorphous-Germanium Nitrogen Alloys Prepared by Reactive Sputtering / p25 (0027.jp2)
- Summary / p25 (0027.jp2)
- 2-1 Introduction / p26 (0028.jp2)
- 2-2 Experimental / p28 (0030.jp2)
- 2-3 Results and Discussion / p29 (0031.jp2)
- 2-4 Conclusion / p41 (0043.jp2)
- 2-5 Acknowledgement / p43 (0045.jp2)
- References / p46 (0048.jp2)
- Chapter III Thermally-induced Structural Changes of a-Ge:H/a-GeNx Multilayer Structures / p65 (0067.jp2)
- Summary / p65 (0067.jp2)
- 3-1 Introduction / p66 (0068.jp2)
- 3-2 Experimental / p67 (0069.jp2)
- 3-3 Results and Discussion / p69 (0071.jp2)
- 3-4 Conclusion / p88 (0090.jp2)
- References / p96 (0098.jp2)
- ChapterIV Electrical Transport Properties of a-Ge:H/a-GeNx Multilayer Films / p115 (0117.jp2)
- Summary / p115 (0117.jp2)
- 4-1 Introduction / p116 (0118.jp2)
- 4-2 Experiment / p117 (0119.jp2)
- 4-3 Results&Discussions / p119 (0121.jp2)
- 4-4 Conclusion / p125 (0127.jp2)
- Appendix / p127 (0129.jp2)
- References / p132 (0134.jp2)
- Chapter V Growth Process and Structural Disorder of Reactively-Sputtered a-Si:H/a-SiNx Multilayer Films. / p140 (0142.jp2)
- Summary / p140 (0142.jp2)
- 5-1 Introduction / p141 (0143.jp2)
- 5-2 Experimental / p144 (0146.jp2)
- 5-3 Results / p146 (0148.jp2)
- 5-4 Conclusions / p151 (0153.jp2)
- Appendix / p153 (0155.jp2)
- References / p155 (0157.jp2)
- Chapter IV Conclusion / p161 (0163.jp2)
- EPILOGUE / p167 (0169.jp2)