Study of Au[-] production in a plasma-sputter type negative ion source プラズマスパッタ型負イオン源におけるAu[-]生成特性の研究
Access this Article
Search this Article
Author
Bibliographic Information
- Title
-
Study of Au[-] production in a plasma-sputter type negative ion source
- Other Title
-
プラズマスパッタ型負イオン源におけるAu[-]生成特性の研究
- Author
-
岡部, 裕志郎
- Author(Another name)
-
オカベ, ユウシロウ
- University
-
名古屋大学
- Types of degree
-
理学博士
- Grant ID
-
甲第2526号
- Degree year
-
1991-10-24
Note and Description
博士論文
Table of Contents
- Table of Contents / p5 (0007.jp2)
- Abstract / p2 (0004.jp2)
- Acknowledgement / p4 (0006.jp2)
- §1.Introduction / p7 (0009.jp2)
- §2.Relevant Physics / p12 (0014.jp2)
- 2-1 Sputtering process / p12 (0014.jp2)
- 2-2 Mechanism of negative ion formation / p14 (0016.jp2)
- 2-3 Principle of the work function measurement / p19 (0021.jp2)
- §3.Experimental / p23 (0025.jp2)
- 3-1 Ion source / p23 (0025.jp2)
- 3-2 Work function measurement system / p29 (0031.jp2)
- 3-3 Au⁻detection system / p32 (0034.jp2)
- 3-4 Experimental procedure / p35 (0037.jp2)
- §4.Results and discussion / p39 (0041.jp2)
- 4-1 Two wavelength measurement of Au⁻production / p39 (0041.jp2)
- 4-2 Au⁻measurement under the constant work function / p45 (0047.jp2)
- 4-3 Energy distribution of Au⁻beam / p47 (0049.jp2)
- §5.Summary / p49 (0051.jp2)
- References / p51 (0053.jp2)
- Correlation of surface production of negative ions and the work function measured by laser-induced photoelectron current / p418 (0075.jp2)
- Dependence of Au⁻ Production upon the Target Work Function in a Plasma-Sputter-Type Negative Ion Source / p1307 (0079.jp2)
- Energy Distribution of Au⁻ Ions Produced by Sputtering / L1428 / (0086.jp2)
- Magnetic energy analyzer with a microchannel plate calibrated using cellulose nitrate film / p20 (0092.jp2)