Characterization and applications of high density oxygen plasma downstream 高密度酸素プラズマ流の評価と応用
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著者
書誌事項
- タイトル
-
Characterization and applications of high density oxygen plasma downstream
- タイトル別名
-
高密度酸素プラズマ流の評価と応用
- 著者名
-
Sunil Wickramanayaka, Senarath Wickramanayaka Mudiyanselage
- 著者別名
-
スニル ウィクラマナヤカ, セナラト ウィクラマナヤカ ムディヤンセラゲ
- 学位授与大学
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静岡大学
- 取得学位
-
博士 (工学)
- 学位授与番号
-
甲第77号
- 学位授与年月日
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1992-10-23
注記・抄録
博士論文
doctoral
電子科学研究科
甲第77号
目次
- Abstract / p7 (0005.jp2)
- Contents / p11 (0007.jp2)
- 1.Nature and History of man made plasma / p1 (0009.jp2)
- 1.1 Introduction / p1 (0009.jp2)
- 1.2 Nature of Plasma / p3 (0010.jp2)
- 1.3 History of man made plasma / p6 (0012.jp2)
- References / p8 (0013.jp2)
- 2.Theory and instrumentation for high density state plasma / p10 (0014.jp2)
- 2.1 High frequency discharges / p10 (0014.jp2)
- 2.2 High density state of plasmas / p12 (0015.jp2)
- 2.3 Instrumentation for high density plasma / p16 (0017.jp2)
- References / p19 (0018.jp2)
- 3.Characterization and properties of high density oxygen plasma downstream / p20 (0019.jp2)
- 3.1 Introduction / p20 (0019.jp2)
- 3.2 Experimental / p27 (0022.jp2)
- 3.3 Results and discussion / p34 (0026.jp2)
- 3.4 Conclusions / p53 (0035.jp2)
- References / p54 (0036.jp2)
- 4.Measurements of downstream gas temperature variation / p56 (0037.jp2)
- 4.1 Introduction / p56 (0037.jp2)
- 4.2 Theory of gas temperature calculations / p57 (0037.jp2)
- 4.3 Experimental / p60 (0039.jp2)
- 4.4 Results and discussion / p61 (0039.jp2)
- 4.5 Conclusions / p69 (0043.jp2)
- References / p70 (0044.jp2)
- 5.Measurements of catalytic efficiency of surfaces for the removal of atomic oxygen using [化学式] continuum / p71 (0044.jp2)
- 5.1 Introduction / p71 (0044.jp2)
- 5.2 Method / p73 (0045.jp2)
- 5.3 Experimental / p77 (0047.jp2)
- 5.4 Results and discussion / p80 (0049.jp2)
- 5.5 Conclusions / p84 (0051.jp2)
- References / p85 (0051.jp2)
- 6.Plasma enhanced oxidation of thin Cu films / p87 (0052.jp2)
- 6.1 Introduction / p87 (0052.jp2)
- 6.2 Experimental / p89 (0053.jp2)
- 6.3 Discussion / p90 (0054.jp2)
- 6.4 Conclusions / p104 (0061.jp2)
- References / p105 (0061.jp2)
- 7.Glow and plasmoidal plasmas for SiO₂ deposition with tetraethoxysilane / p107 (0062.jp2)
- 7.1 Introduction / p107 (0062.jp2)
- 7.2 Experimental / p108 (0063.jp2)
- 7.3 Results and discussion / p110 (0064.jp2)
- 7.4 Conclusions / p123 (0070.jp2)
- References / p125 (0071.jp2)
- Appendix1 / p127 (0072.jp2)
- Appendix2 / p128 (0073.jp2)
- List of publications arisen from the doctoral research project / p129 (0073.jp2)
- List of oral presentations / p130 (0074.jp2)