Study on silicon capacitive microsensors and electrostatic microactuators : towards a micro electro mechanical system (MEMS) シリコン静電容量形マイクロセンサと静電マイクロアクチュエータの研究 : 微小電気機械システム(MEMS)の実現へ向って
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著者
書誌事項
- タイトル
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Study on silicon capacitive microsensors and electrostatic microactuators : towards a micro electro mechanical system (MEMS)
- タイトル別名
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シリコン静電容量形マイクロセンサと静電マイクロアクチュエータの研究 : 微小電気機械システム(MEMS)の実現へ向って
- 著者名
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鈴木, 健一郎, 応用物理学
- 著者別名
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スズキ, ケンイチロウ
- 学位授与大学
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東北大学
- 取得学位
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博士 (工学)
- 学位授与番号
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乙第6088号
- 学位授与年月日
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1993-05-12
注記・抄録
博士論文
博士学位論文 (Thesis(doctor))
目次
- TABLE OF CONTENTS / p1 (0002.jp2)
- I.INTRODUCTION / p1 (0004.jp2)
- 1.1 EXPECTATION FOR MICROSYSTEM / p3 (0005.jp2)
- 1.2 KEY ROLE OF CAPACITIVE SENSORS AND ELECTROSTATIC ACTUATORS / p5 (0006.jp2)
- 1.3 OBJECTIVE AND SCOPE OF THE DISSERTATION / p7 (0007.jp2)
- II.SYSTEM SIZE CONSIDERATIONS / p11 (0009.jp2)
- 2.1 MICRO SYSTEM ADVANTAGES / p12 (0010.jp2)
- 2.2 SYSTEM SIZE COMPARISON / p13 (0010.jp2)
- 2.3 ELECTROSTATIC VS. ELECTROMAGNETIC FOR ACTUATORS AND SENSORS / p18 (0013.jp2)
- III.DESIGN CONSIDERATIONS FOR SILICON MICROSTRUCTURE SENSORS / p31 (0019.jp2)
- 3.1 MECHANICAL STRUCTURE CONSIDERATION / p32 (0020.jp2)
- 3.2 SENSOR DETECTION METHOD CONSIDERATION / p44 (0026.jp2)
- IV.CHARACTERIZATION OF THIN FILM MECHANICAL PROPERTIES / p61 (0034.jp2)
- 4.1 MICROSCOPIC MEASUREMENT TECHNIQUES / p62 (0035.jp2)
- 4.2 PRINCIPLE OF DOUBLY-SUPPORTED BEAM COLLAPSE TECHNIQUE / p68 (0038.jp2)
- 4.3 MECHANICAL PROPERTIES IN HEAVILY BORON-DOPED SILICON THIN LAYER / p78 (0043.jp2)
- 4.4 EVALUATION OF AND IMPROVEMENT IN THE MEASUREMENT TECHNIQUE / p82 (0045.jp2)
- V.FABRICATION METHODS:SILICON MICROMACHINING / p92 (0050.jp2)
- 5.1 SILICON BULK MICROMACHINING / p93 (0050.jp2)
- 5.2 SURFACE MICROMACHINING / p106 (0057.jp2)
- 5.3 DRY ETCHING / p110 (0059.jp2)
- VI.CAPACITIVE ARRAY SENSOR: HIGH-DENSITY SILICON TACTILE IMAGER / p114 (0061.jp2)
- 6.1 VARIOUS SILICON TACTILE IMAGERS / p116 (0062.jp2)
- 6.2 CAPACITIVE TACTILE IMAGER STRUCTURE / p119 (0063.jp2)
- 6.3 FABRICATION / p125 (0066.jp2)
- 6.4 READOUT CIRCUITRY / p133 (0070.jp2)
- 6.5 RESULTS / p136 (0072.jp2)
- 6.6 PROCESS ALTERNATIVES FOR HIGH-DENSITY SILICON TACTILE IMAGERS / p141 (0074.jp2)
- 6.7 PACKAGING AND SCALING BEHAVIOR / p148 (0078.jp2)
- 6.8 SUMMARY / p154 (0081.jp2)
- VII.SILICON ELECTROSTATIC MICROACTUATORS / p156 (0082.jp2)
- 7.1 DESIGN CONSIDERATIONS / p158 (0083.jp2)
- 7.2 LINEAR MICROACTUATORS / p171 (0089.jp2)
- 7.3 ROTATIONAL MICROMOTOR / p178 (0093.jp2)
- 7.4 DISCUSSIONS / p193 (0100.jp2)
- 7.5 SUMMARY / p196 (0102.jp2)
- VIII.ACTIVE SENSOR BASED ON CAPACITIVE DETECTION AND ELECTROSTATIC TRANSMISSION:A SILICON ELECTROSTATIC ULTRASONIC TRANSDUCER / p199 (0103.jp2)
- 8.1 INTRODUCTION / p199 (0103.jp2)
- 8.2 DESIGN CONSIDERATIONS / p201 (0104.jp2)
- 8.3 FABRICATION / p207 (0107.jp2)
- 8.4 RESULTS / p211 (0109.jp2)
- 8.5 DISCUSSION / p226 (0117.jp2)
- 8.6 SUMMARY / p228 (0118.jp2)
- IX.DISCUSSIONS FOR FURTHER RESEARCH / p230 (0119.jp2)
- 9.1 PROBLEMS AND PERSPECTIVES IN THE MICROSENSORS / p231 (0119.jp2)
- 9.2 PROBLEMS AND PERSPECTIVES IN THE MICROACTUATORS AND MICROMECHANICAL SYSTEMS / p242 (0125.jp2)
- X.CONCLUSIONS / p246 (0127.jp2)
- ACKNOWLEDGEMENT / p252 (0130.jp2)
- REFERENCES / p254 (0131.jp2)
- VITA / p272 (0140.jp2)