Interfacial layers of high-barrier Schottky diode of Al/n-type (100)Si exposed to H[2] plasma H[2]プラズマ処理により障壁高を高めたAl/n型(100)Siショットキーダイオードの界面層
Access this Article
Search this Article
Author
Bibliographic Information
- Title
-
Interfacial layers of high-barrier Schottky diode of Al/n-type (100)Si exposed to H[2] plasma
- Other Title
-
H[2]プラズマ処理により障壁高を高めたAl/n型(100)Siショットキーダイオードの界面層
- Author
-
岩黒, 弘明
- Author(Another name)
-
イワクロ, ヒロアキ
- University
-
東京大学
- Types of degree
-
博士 (理学)
- Grant ID
-
乙第11155号
- Degree year
-
1993-03-15
Note and Description
博士論文
Table of Contents
- CONTENTS / (0005.jp2)
- 1.INTRODUCTION / p1 (0008.jp2)
- 1.1 Hydrogen in Semiconductors / p1 (0008.jp2)
- 1.2 Dependence of Schottky Barrier Height on Incorporation of Hydrogen into Silicon / p4 (0011.jp2)
- 1.3 Purpose of Present Study / p6 (0013.jp2)
- 2.EXPERIMENTAL / p8 (0015.jp2)
- 2.1 Specimen Preparation / p8 (0015.jp2)
- 2.2 Plasma Conditions / p17 (0024.jp2)
- 2.3 Schottky Barrier Height Measurement / p20 (0027.jp2)
- 2.4 Transmission Electron Microscopy / p21 (0028.jp2)
- 2.5 X-ray Photoelectron Spectroscopy / p22 (0029.jp2)
- 2.6 Secondary Ion Mass Spectrometry / p22 (0029.jp2)
- 3.EXPERIMENTAL RESULTS ON SCHOTTKY BARRIER HEIGHT / p23 (0030.jp2)
- 3.1 Current-voltage Characteristics / p23 (0030.jp2)
- 3.2 Plasma rf Power Dependence / p28 (0035.jp2)
- 3.3 Hydrogen Concentration Dependence / p32 (0039.jp2)
- 3.4 Plasma Gas Dependence / p34 (0041.jp2)
- 3.5 Characterization by Schottky Barrier Height / p36 (0043.jp2)
- 4.EXPERIMENTAL RESULTS ON TEM,XPS AND SIMS / p38 (0045.jp2)
- 4.1 Transmission Electron Microscopy / p38 (0045.jp2)
- 4.2 X-ray Photoelectron Spectroscopy / p50 (0057.jp2)
- 4.3 Secondary Ion Mass Spectrometry / p59 (0066.jp2)
- 5.DISCUSSION / p61 (0068.jp2)
- 5.1 Increase in the Schottky Barrier Height by H₂ Plasma Exposure / p61 (0068.jp2)
- 5.2 Mechanism of Increase in the Schottky Barrier Height / p62 (0069.jp2)
- 5.3 Control of Schottky Barrier Height and Band Gap Width by H₂ Plasma Exposure / p64 (0071.jp2)
- 6.CONCLUSIONS / p66 (0073.jp2)
- References / p67 (0074.jp2)