High precision measurement of machined surface profiles 加工面形状の高精度測定に関する研究
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著者
書誌事項
- タイトル
-
High precision measurement of machined surface profiles
- タイトル別名
-
加工面形状の高精度測定に関する研究
- 著者名
-
葛, 宗涛
- 著者別名
-
Ge, Zhong Tao
- 学位授与大学
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東北大学
- 取得学位
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博士 (工学)
- 学位授与番号
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甲第5593号
- 学位授与年月日
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1996-03-26
注記・抄録
博士論文
目次
- Contents / p1 (0006.jp2)
- 1.INTRODUCTION / p1 (0011.jp2)
- 1.1.Background and Objective / p1 (0011.jp2)
- 1.2.Contents and Dissertation Arrangement / p9 (0019.jp2)
- 1.3.References / p11 (0021.jp2)
- 2.SURFACE PROFILE MEASUREMENT USING DIFFERENTIAL INTERFEROMETER / p20 (0030.jp2)
- 2.1.Abstract / p20 (0030.jp2)
- 2.2.Introduction / p20 (0030.jp2)
- 2.3.Principle of Operation / p21 (0031.jp2)
- 2.4.Evaluation of Differential Interferometer / p31 (0041.jp2)
- 2.5.Surface Profile Measurement / p39 (0049.jp2)
- 2.6.Summary / p40 (0050.jp2)
- 2.7.References / p41 (0051.jp2)
- 3.SELF-CALIBRATION OF DISPLACEMENT SENSORS / p43 (0053.jp2)
- 3.1.Abstract / p43 (0053.jp2)
- 3.2.Introduction / p43 (0053.jp2)
- 3.3.Principle of Operation / p45 (0055.jp2)
- 3.4.Experiments / p51 (0061.jp2)
- 3.5.Discussion / p61 (0071.jp2)
- 3.6.Summary / p65 (0075.jp2)
- 3.7.References / p66 (0076.jp2)
- 4.SURFACE PROFILE MEASUREMENT BY 3-POINT METHOD / p69 (0079.jp2)
- 4.1.Abstract / p69 (0079.jp2)
- 4.2.Introduction / p69 (0079.jp2)
- 4.3.Principle of Operation / p71 (0081.jp2)
- 4.4.Experiment / p83 (0093.jp2)
- 4.5.Summary / p87 (0097.jp2)
- 4.6.References / p87 (0097.jp2)
- 5.BASIC STUDY ON THE MEASUREMENT OF 2-D SURFACE PROFILE:PART1 / p91 (0101.jp2)
- 5.1.Abstract / p91 (0101.jp2)
- 5.2.Introduction / p91 (0101.jp2)
- 5.3.Measurement Method and Transfer Function / p92 (0102.jp2)
- 5.4.Transfer Function and Spatial Frequency Resolution / p101 (0111.jp2)
- 5.5.Transfer Function and Longitudinal Resolution / p103 (0113.jp2)
- 5.6.Conclusions / p107 (0117.jp2)
- 5.7.References / p108 (0118.jp2)
- 6.BASIC STUDY ON THE MEASUREMENT OF 2-D SURFACE PROFILES:PART2 / p110 (0120.jp2)
- 6.1.Abstract / p110 (0120.jp2)
- 6.2.Introduction / p110 (0120.jp2)
- 6.3.Principle of Measurement / p111 (0121.jp2)
- 6.4.Error Analysis / p115 (0125.jp2)
- 6.5.Conclusions / p132 (0142.jp2)
- 6.6.References / p132 (0142.jp2)
- 7.BASIC STUDY ON THE MEASUREMENT OF 2-D SURFACE PROFILES:PART3 / p134 (0144.jp2)
- 7.1.Abstract / p134 (0144.jp2)
- 7.2.Introduction / p134 (0144.jp2)
- 7.3.Principle of Measurement / p136 (0146.jp2)
- 7.4.Description of Apparatus / p140 (0150.jp2)
- 7.5.Evaluation of Measurement System / p147 (0157.jp2)
- 7.6.Profile Measurement / p156 (0166.jp2)
- 7.7.Conclusions / p164 (0174.jp2)
- 7.8.References / p165 (0175.jp2)
- 8.CONCLUSIONS / p167 (0177.jp2)
- PUBLICATIONS / p173 (0183.jp2)
- ACKNOWLEDGMENTS / p175 (0185.jp2)