Structure and properties of M-C (M:Ni, Co) composite films prepared by a codeposition method 同時堆積法によるM-C (M:Ni, Co) 複合膜の構造と物性

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Author

    • 史, 蹟 シ, セキ

Bibliographic Information

Title

Structure and properties of M-C (M:Ni, Co) composite films prepared by a codeposition method

Other Title

同時堆積法によるM-C (M:Ni, Co) 複合膜の構造と物性

Author

史, 蹟

Author(Another name)

シ, セキ

University

東京工業大学

Types of degree

博士 (工学)

Grant ID

甲第3412号

Degree year

1997-03-26

Note and Description

博士論文

identifier:oai:t2r2.star.titech.ac.jp:99003585

Table of Contents

  1. 論文目録 / (0002.jp2)
  2. Contents / p2 (0005.jp2)
  3. Preface / p1 (0004.jp2)
  4. Chapter 1 Introduction / p1 (0008.jp2)
  5. 1.1 Background of this work / p1 (0008.jp2)
  6. 1.2 Objectives of this study / p2 (0009.jp2)
  7. 1.3 Organization of this thesis / p2 (0009.jp2)
  8. Chapter 2 Fundamentals of sputtering and CVD processes / p5 (0012.jp2)
  9. 2.1 Sputtering phenomenon / p5 (0012.jp2)
  10. 2.2 Sputtering deposition techniques / p6 (0013.jp2)
  11. 2.3 Ion beam sputtering(IBS) / p9 (0016.jp2)
  12. 2.4 Chemical vapor deposition(CVD)process / p11 (0018.jp2)
  13. 2.5 Summary / p12 (0019.jp2)
  14. Chapter 3 Dual-source deposition system used in this studuy / p14 (0021.jp2)
  15. 3.1 Overview / p14 (0021.jp2)
  16. 3.2 Kaufman ion source / p16 (0023.jp2)
  17. 3.3 ECR microwave plasma source / p19 (0026.jp2)
  18. 3.4 Energy-dispersive x-ray diffraction attachment / p21 (0028.jp2)
  19. 3.5 Summary / p22 (0029.jp2)
  20. Chapter 4 Formation of Ni₃C nanocrystallites in Ni-C films / p25 (0032.jp2)
  21. 4.1 Introduction / p25 (0032.jp2)
  22. 4.2 Experimetal procedure / p26 (0033.jp2)
  23. 4.3 Experimental results / p28 (0035.jp2)
  24. 4.4 Discussion / p41 (0048.jp2)
  25. 4.5 Summary / p44 (0051.jp2)
  26. Chapter 5 Physical properties of Ni-C composite films / p46 (0053.jp2)
  27. 5.1 Introduction / p46 (0053.jp2)
  28. 5.2 Experimental procedure / p47 (0054.jp2)
  29. 5.3 Experimental results / p47 (0054.jp2)
  30. 5.4 Discussion / p59 (0066.jp2)
  31. 5.5 Summary / p64 (0071.jp2)
  32. Chapter 6 Microstructure and properties of Co-C composite films / p67 (0074.jp2)
  33. 6.1 Introduction / p67 (0074.jp2)
  34. 6.2 Experimental procedure / p68 (0075.jp2)
  35. 6.3 Experimental results / p69 (0076.jp2)
  36. 6.4 Discussion / p79 (0086.jp2)
  37. 6.5 Summary / p81 (0088.jp2)
  38. Chapter 7 Magnetic property improvement of Co-C films / p83 (0090.jp2)
  39. 7.1 Introduction / p83 (0090.jp2)
  40. 7.2 Experimental procedure / p83 (0090.jp2)
  41. 7.3 Experimental results / p84 (0091.jp2)
  42. 7.4 Discussion / p96 (0103.jp2)
  43. 7.5 Summary / p100 (0107.jp2)
  44. Chapter 8 Conclusions / p102 (0109.jp2)
  45. Publications / p104 (0111.jp2)
  46. Acknowledgments / p106 (0113.jp2)
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Codes

  • NII Article ID (NAID)
    500000153614
  • NII Author ID (NRID)
    • 8000001092634
  • DOI(NDL)
  • NDLBibID
    • 000000317928
  • Source
    • Institutional Repository
    • NDL ONLINE
    • NDL Digital Collections

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