Study of transparent conducting ZnO grown by atomic layer deposition and its applications to amorphous silicon solar cells 原子層成長法によるZnO透明導電膜の作製とa-Si太陽電池への応用に関する研究

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Author

    • 桑, 保生 ソウ, ホセイ

Bibliographic Information

Title

Study of transparent conducting ZnO grown by atomic layer deposition and its applications to amorphous silicon solar cells

Other Title

原子層成長法によるZnO透明導電膜の作製とa-Si太陽電池への応用に関する研究

Author

桑, 保生

Author(Another name)

ソウ, ホセイ

University

東京工業大学

Types of degree

博士 (学術)

Grant ID

甲第3725号

Degree year

1998-03-26

Note and Description

博士論文

Table of Contents

  1. 論文目録 / (0002.jp2)
  2. Chapter 1 Overview and Objective of This Research / p1 (0007.jp2)
  3. Chapter 2 Key Features of A-Si Solar Cells and Their Transparent Conducting Oxides / p7 (0010.jp2)
  4. 2.1 Introduction / p7 (0010.jp2)
  5. 2.2 Key features of a-Si solar cells / p8 (0011.jp2)
  6. 2.3 Transparent conducting oxides for a-Si solar cells / p10 (0012.jp2)
  7. 2.4 Fundamental aspects of ZnO / p19 (0016.jp2)
  8. References / p27 (0020.jp2)
  9. Chapter 3 Atomic Layer Deposition of Undoped ZnO / p31 (0022.jp2)
  10. 3.1 Introduction / p31 (0022.jp2)
  11. 3.2 General aspects of atomic layer deposition / p32 (0023.jp2)
  12. 3.3 Experimental procedure / p39 (0026.jp2)
  13. 3.4 Self-limiting growth of ZnO films / p42 (0028.jp2)
  14. 3.5 Characterization of ZnO films / p51 (0032.jp2)
  15. 3.6 Electrical transport mechanism in the films / p64 (0039.jp2)
  16. 3.7 Summary / p69 (0041.jp2)
  17. References / p71 (0042.jp2)
  18. Chapter 4 Atomic Layer Deposition of Boron-doped ZnO / p73 (0043.jp2)
  19. 4.1 Introduction / p73 (0043.jp2)
  20. 4.2 Experimental procedure / p74 (0044.jp2)
  21. 4.3 Film properties / p75 (0044.jp2)
  22. 4.4 Stability of ZnO films / p96 (0055.jp2)
  23. 4.5 Summary / p104 (0059.jp2)
  24. References / p105 (0059.jp2)
  25. Chapter 5 Photo-induced Atomic Layer Deposition of ZnO / p107 (0060.jp2)
  26. 5.1 Introduction / p107 (0060.jp2)
  27. 5.2 Experimental / p108 (0061.jp2)
  28. 5.3 Effect of photo-induction on the film properties / p108 (0061.jp2)
  29. 5.4 Summary / p120 (0067.jp2)
  30. References / p121 (0067.jp2)
  31. Chapter 6 High Efficiency a-Si Solar Cells Using ZnO Grown by Atomic Layer Deposition / p123 (0068.jp2)
  32. 6.1 Introduction / p123 (0068.jp2)
  33. 6.2 A two-step deposition process / p125 (0069.jp2)
  34. 6.3 A-Si solar cells with the ZnO films grown by the two-step process / p142 (0078.jp2)
  35. 6.4 Summary / p156 (0085.jp2)
  36. References / p158 (0086.jp2)
  37. Chapter 7 General Conclusions / p161 (0087.jp2)
  38. Acknowledgments / p165 (0089.jp2)
  39. List of Publications / p166 (0090.jp2)
7access

Codes

  • NII Article ID (NAID)
    500000165346
  • NII Author ID (NRID)
    • 8000001163023
  • DOI(NDL)
  • NDLBibID
    • 000000329660
  • Source
    • NDL ONLINE
    • NDL Digital Collections
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