Study of transparent conducting ZnO grown by atomic layer deposition and its applications to amorphous silicon solar cells 原子層成長法によるZnO透明導電膜の作製とa-Si太陽電池への応用に関する研究
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Bibliographic Information
- Title
-
Study of transparent conducting ZnO grown by atomic layer deposition and its applications to amorphous silicon solar cells
- Other Title
-
原子層成長法によるZnO透明導電膜の作製とa-Si太陽電池への応用に関する研究
- Author
-
桑, 保生
- Author(Another name)
-
ソウ, ホセイ
- University
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東京工業大学
- Types of degree
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博士 (学術)
- Grant ID
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甲第3725号
- Degree year
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1998-03-26
Note and Description
博士論文
Table of Contents
- 論文目録 / (0002.jp2)
- Chapter 1 Overview and Objective of This Research / p1 (0007.jp2)
- Chapter 2 Key Features of A-Si Solar Cells and Their Transparent Conducting Oxides / p7 (0010.jp2)
- 2.1 Introduction / p7 (0010.jp2)
- 2.2 Key features of a-Si solar cells / p8 (0011.jp2)
- 2.3 Transparent conducting oxides for a-Si solar cells / p10 (0012.jp2)
- 2.4 Fundamental aspects of ZnO / p19 (0016.jp2)
- References / p27 (0020.jp2)
- Chapter 3 Atomic Layer Deposition of Undoped ZnO / p31 (0022.jp2)
- 3.1 Introduction / p31 (0022.jp2)
- 3.2 General aspects of atomic layer deposition / p32 (0023.jp2)
- 3.3 Experimental procedure / p39 (0026.jp2)
- 3.4 Self-limiting growth of ZnO films / p42 (0028.jp2)
- 3.5 Characterization of ZnO films / p51 (0032.jp2)
- 3.6 Electrical transport mechanism in the films / p64 (0039.jp2)
- 3.7 Summary / p69 (0041.jp2)
- References / p71 (0042.jp2)
- Chapter 4 Atomic Layer Deposition of Boron-doped ZnO / p73 (0043.jp2)
- 4.1 Introduction / p73 (0043.jp2)
- 4.2 Experimental procedure / p74 (0044.jp2)
- 4.3 Film properties / p75 (0044.jp2)
- 4.4 Stability of ZnO films / p96 (0055.jp2)
- 4.5 Summary / p104 (0059.jp2)
- References / p105 (0059.jp2)
- Chapter 5 Photo-induced Atomic Layer Deposition of ZnO / p107 (0060.jp2)
- 5.1 Introduction / p107 (0060.jp2)
- 5.2 Experimental / p108 (0061.jp2)
- 5.3 Effect of photo-induction on the film properties / p108 (0061.jp2)
- 5.4 Summary / p120 (0067.jp2)
- References / p121 (0067.jp2)
- Chapter 6 High Efficiency a-Si Solar Cells Using ZnO Grown by Atomic Layer Deposition / p123 (0068.jp2)
- 6.1 Introduction / p123 (0068.jp2)
- 6.2 A two-step deposition process / p125 (0069.jp2)
- 6.3 A-Si solar cells with the ZnO films grown by the two-step process / p142 (0078.jp2)
- 6.4 Summary / p156 (0085.jp2)
- References / p158 (0086.jp2)
- Chapter 7 General Conclusions / p161 (0087.jp2)
- Acknowledgments / p165 (0089.jp2)
- List of Publications / p166 (0090.jp2)