Numerical computations of time-dependent three-dimensional transport phenomena of silicon melt in the Czochralski process using a cusp-shaped magnetic field カスプ磁場Cz法におけるシリコン融液の非定常3次元輸送現象の数値計算
この論文にアクセスする
この論文をさがす
著者
書誌事項
- タイトル
-
Numerical computations of time-dependent three-dimensional transport phenomena of silicon melt in the Czochralski process using a cusp-shaped magnetic field
- タイトル別名
-
カスプ磁場Cz法におけるシリコン融液の非定常3次元輸送現象の数値計算
- 著者名
-
元, 裕喆
- 著者別名
-
ウォン, ユーチョル
- 学位授与大学
-
九州大学
- 取得学位
-
博士(工学)
- 学位授与番号
-
甲第4850号
- 学位授与年月日
-
1999-03-25
注記・抄録
博士論文
目次
- 論文目録 / (0004.jp2)
- 論文内容の要旨 / (0006.jp2)
- Contents / p1 (0008.jp2)
- List of Tables / p3 (0009.jp2)
- List of Figures / p4 (0010.jp2)
- Nomenclature / p12 (0014.jp2)
- 1.Introduction / p1 (0016.jp2)
- 1.1.Czochralski process as a crystal growing method / p1 (0016.jp2)
- 1.2.Magnetic Czochralski method / p4 (0017.jp2)
- 1.3.Research objectives / p7 (0019.jp2)
- 1.4.Thesis outline / p8 (0019.jp2)
- 2.Mathematical background / p11 (0021.jp2)
- 2.1.Mathematical model / p11 (0021.jp2)
- 2.2.Governing equations / p14 (0022.jp2)
- 2.3.Boundary conditions / p15 (0023.jp2)
- 2.4.Computational schemes / p17 (0024.jp2)
- 3.Transient three-dimensional flow characteristics of the silicon melt in a Czochralski configuration under a cusp-shaped magnetic field / p20 (0025.jp2)
- 3.1.Mathematical model / p20 (0025.jp2)
- 3.2.Boundary conditions / p22 (0026.jp2)
- 3.3.Computational scheme / p23 (0027.jp2)
- 3.4.Results and discussion / p24 (0027.jp2)
- 3.5.Conclusion / p28 (0029.jp2)
- 4.Transient three-dimensional numerical computation for unsteady oxygen concentration in silicon melt during a Czochralski process under a cusp-shaped magnetic field / p45 (0038.jp2)
- 4.1.Mathematical model / p46 (0038.jp2)
- 4.2.Boundary conditions / p47 (0039.jp2)
- 4.3.Computational scheme / p49 (0040.jp2)
- 4.4.Results and discussion / p50 (0040.jp2)
- 4.5.Conclusion / p53 (0042.jp2)
- 5.Transient three-dimensional characteristics of heat and fluid flow of silicon melt in a Czochralski configuration by the change of relative position of a cusp-shaped magnetic field to the melt / p68 (0049.jp2)
- 5.1.The system considered / p68 (0049.jp2)
- 5.2.Results / p69 (0050.jp2)
- 5.3.Discussion / p80 (0055.jp2)
- 5.4.Conclusion / p82 (0056.jp2)
- 6.Transient three-dimensional characteristics of oxygen transfer of silicon melt in a Czochralski configuration by the change of relative position of a cusp-shaped magnetic field to the melt / p134 (0082.jp2)
- 6.1.Mathematical model / p135 (0083.jp2)
- 6.2.Boundary conditions / p137 (0084.jp2)
- 6.3.Results / p139 (0085.jp2)
- 6.4.Discussion / p142 (0086.jp2)
- 6.5.Conclusion / p143 (0087.jp2)
- 7.Concluding Remarks / p161 (0096.jp2)
- Bibliography / p164 (0097.jp2)