High-Density Planar Plasma Production by Surface Wave Excitation(表面波による高密度平板状プラズマの生成) High-Density Planar Plasma Production Surface Wave Excitation 表面波 高 密度 平板状 プラズマ 生成
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著者
書誌事項
- タイトル
-
High-Density Planar Plasma Production by Surface Wave Excitation(表面波による高密度平板状プラズマの生成)
- タイトル別名
-
High-Density Planar Plasma Production Surface Wave Excitation 表面波 高 密度 平板状 プラズマ 生成
- 著者名
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Ivan Petrov Ghanashev
- 著者別名
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イブアン ベトロフ ガナシエフ
- 学位授与大学
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名古屋大学
- 取得学位
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博士 (工学)
- 学位授与番号
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甲第4279号
- 学位授与年月日
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1999-03-25
注記・抄録
博士論文
目次
- Contents/p1 (3コマ目)
- 1 Introduction/p1 (7コマ目)
- 1.1 Background/p1 (7コマ目)
- 1.2 Composition of the dissertation/p2 (8コマ目)
- 1.3 Electromagnetic and electrostatic waves in non-magnetized plasmas/p4 (9コマ目)
- 1.4 Review of large-area surface-wave plasma tools/p14 (14コマ目)
- 1.5 Advantages of slot-excited surface-wave plasmas/p21 (17コマ目)
- 2 Eigen-Modes Theory for Homogeneous Plasma/p27 (20コマ目)
- 2.1 Introduction/p27 (20コマ目)
- 2.2 Dispersion equation/p28 (21コマ目)
- 2.3 Approximations for the pure surface modes/p39 (26コマ目)
- 2.4 Discussion/p42 (28コマ目)
- 3 Eigen-Modes Theory for Axially Inhomogeneous Plasma/p50 (32コマ目)
- 3.1 Step density profile model/p50 (32コマ目)
- 3.2 Continuous density profile model/p52 (33コマ目)
- 3.3 Numerical results and comparison with experiment/p56 (35コマ目)
- 4 Experimental Apparatus and Methods/p63 (38コマ目)
- 4.1 Geometry and operation/p63 (38コマ目)
- 4.2 Measurement techniques/p66 (40コマ目)
- 5 Experimental Mode Identification of the Pure Surface Modes/p72 (43コマ目)
- 5.1 Introduction/p72 (43コマ目)
- 5.2 Light emission patterns and microwave intensity profiles/p73 (43コマ目)
- 5.3 Plasma parameters/p77 (45コマ目)
- 5.4 Penetration depths/p77 (45コマ目)
- 5.5 Summary/p81 (47コマ目)
- 6 Experimental Mode Identification of the Hybrid Surface Modes/p84 (49コマ目)
- 6.1 Introduction/p84 (49コマ目)
- 6.2 Experimental results and discussion/p85 (49コマ目)
- 6.3 Conclusion/p91 (52コマ目)
- 7 Mode Jumps,Hysteresis Loops and Stability/p94 (54コマ目)
- 7.1 Introduction/p94 (54コマ目)
- 7.2 Energy balance equation/p96 (55コマ目)
- 7.3 Power reflection and absorption coefficients/p97 (55コマ目)
- 7.4 Mean power for sustaining one electron-ion pair/p102 (58コマ目)
- 7.5 Stability criterion/p103 (58コマ目)
- 7.6 Discussion and conclusion/p105 (59コマ目)
- 8 Power Reflection Coefficient Measurements/p111 (62コマ目)
- 8.1 Introduction/p111 (62コマ目)
- 8.2 Experimental Set-Up/p112 (63コマ目)
- 8.3 Experimental Results and Discussion/p116 (65コマ目)
- 8.4 Conclusion/p127 (70コマ目)
- 9 Surface-Wave Excitated Localized Plasma Oscillations/p130 (72コマ目)
- 9.1 Introduction/p130 (72コマ目)
- 9.2 Experimental set-up/p135 (74コマ目)
- 9.3 Results and Discussion/p138 (76コマ目)
- 9.4 Conclusion/p146 (80コマ目)
- Summary/p149 (81コマ目)
- Acknowledgments/p152 (83コマ目)
- A List of Papers and Presentations/p153 (83コマ目)
- A.1 Journal articles/p153 (83コマ目)
- A.2 Presentations at international conferences/p155 (84コマ目)
- A.3 Other publications/p158 (86コマ目)