Macroscopic migration of implanted deuterium in silicon シリコン中での注入重水素の巨視的移動

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著者

    • 片渕, 竜也 カタブチ, タツヤ

書誌事項

タイトル

Macroscopic migration of implanted deuterium in silicon

タイトル別名

シリコン中での注入重水素の巨視的移動

著者名

片渕, 竜也

著者別名

カタブチ, タツヤ

学位授与大学

筑波大学

取得学位

博士 (理学)

学位授与番号

甲第2065号

学位授与年月日

1999-03-25

注記・抄録

博士論文

We have studied the formation mechanism of the ring-like flaking in silicon implanted with deuterium ions. It is the first observations of the decrease of implanted-deuterium concentrations. The decrease of implanted-deuterium concentrations was observed above an irradiation dose of 5.4 × 1017D/c㎡. The present observations have been made by measureing the deuterium concentration using the nuclear reaction 2H(d,p)3H. The dependence of a critical dose for the first flaking on several parameters has also been measured. on several parameters has also been measured. In order to understand the surfaced flaking mechanism and the macroscopic migration of implanted deuterium, we have proposed a new model based on the percolation of gas bubbles. The macroscopic migration of implanted deuterium gives the most probable interpretation of the generation of the ring-like flaking pattern on the irradiated surface.

Thesis (Ph. D. in Science)--University of Tsukuba, (A), no. 2065, 1999.3.25

目次

  1. Abstract / (0003.jp2)
  2. Contents / p1 (0004.jp2)
  3. 1 Introduction / p3 (0006.jp2)
  4. 2 Instruments / p9 (0012.jp2)
  5. 2.1 Ion source / p9 (0012.jp2)
  6. 2.2 Target chamber / p9 (0012.jp2)
  7. 2.3 Beam sweeping system / p10 (0013.jp2)
  8. 2.4 Quadrupole mass analyzer / p11 (0014.jp2)
  9. 2.5 Silicon solid state detector / p12 (0015.jp2)
  10. 2.6 Target cooling system / p13 (0016.jp2)
  11. 3 Experiment I:Macroscopic migration of deuterium / p14 (0017.jp2)
  12. 3.1 Research technique / p14 (0017.jp2)
  13. 3.2 Experiments / p15 (0018.jp2)
  14. 3.3 Experimental results / p17 (0020.jp2)
  15. 4 Experiment II:Critical dose for flaking / p19 (0022.jp2)
  16. 4.1 Experiments / p19 (0022.jp2)
  17. 4.2 Experimental results / p20 (0023.jp2)
  18. 5 Percolation model / p23 (0026.jp2)
  19. 5.1 Introduction / p23 (0026.jp2)
  20. 5.2 Modeling / p25 (0028.jp2)
  21. 5.3 Macroscopic migration / p27 (0030.jp2)
  22. 5.4 Surface exfoliation / p29 (0032.jp2)
  23. 6 Discussion / p34 (0037.jp2)
  24. 6.1 Macroscopic migration of implanted deuterium / p34 (0037.jp2)
  25. 6.2 Critical dose for flaking / p36 (0039.jp2)
  26. 6.3 Ring-like flaking pattern / p38 (0041.jp2)
  27. 6.4 Hydrogen implantation / p39 (0042.jp2)
  28. 7 Conclusion / p41 (0044.jp2)
  29. Acknowledgments / p44 (0047.jp2)
  30. References / p45 (0048.jp2)
  31. Tables / p48 (0051.jp2)
  32. Figures / p56 (0059.jp2)
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各種コード

  • NII論文ID(NAID)
    500000185571
  • NII著者ID(NRID)
    • 8000000185853
  • DOI(NDL)
  • 本文言語コード
    • jpn
  • NDL書誌ID
    • 000000349885
  • データ提供元
    • 機関リポジトリ
    • NDL ONLINE
    • NDLデジタルコレクション
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