Spatial structures of electronegative plasmas maintained by various discharge systems 種々の放電により生成された電気的負性プラズマの空間構造に関する研究
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著者
書誌事項
- タイトル
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Spatial structures of electronegative plasmas maintained by various discharge systems
- タイトル別名
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種々の放電により生成された電気的負性プラズマの空間構造に関する研究
- 著者名
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Nasser, Mahmood Mohammed Khalil
- 著者別名
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ナセル, マハムッド ムハメッド カリル
- 学位授与大学
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佐賀大学
- 取得学位
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博士 (工学)
- 学位授与番号
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甲第124号
- 学位授与年月日
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2000-03-23
注記・抄録
博士論文
Thesis
目次
- TABLE OF CONTENTS / p5 (0005.jp2)
- CHAPTER 1 INTRODUCTION / p1 (0007.jp2)
- 1.1 WHY(DO WE NEED)PLASMA? / p1 (0007.jp2)
- 1.2 PLASMAS AND SHEATHS / p2 (0008.jp2)
- 1.3 COLLISION PROCESSES / p16 (0015.jp2)
- 1.4 WHY TREATING ELECTRONEGATIVE PLASMAS? / p26 (0020.jp2)
- 1.5 PURPOSE AND COMPOSITION OF DISSERTATION / p29 (0021.jp2)
- CHAPTER 2 VARIOUS DISCHARGE SYSTEMS AND MEASUREMENT TECHNIQUES / p34 (0024.jp2)
- 2.1 CAPACITIVELY COUPLED DISCHARGE SYSTEM / p34 (0024.jp2)
- 2.2 INDUCTVELY COUPLED DISCHARGE SYSTEM / p37 (0025.jp2)
- 2.3 HELICON DISCHARGE SYSTEM / p39 (0026.jp2)
- 2.4 DC DISCHARGE SYSTEM / p44 (0029.jp2)
- 2.5 MEASUREMENT TECHNIQUES / p46 (0030.jp2)
- CHAPTER 3 INFLUENCES OF NEGATIVE IONS IN ASYMMETRY CAPACITIVELY COUPLED RF DISCHARGE / p64 (0039.jp2)
- 3.1 INTRODUCTION / p64 (0039.jp2)
- 3.2 EXPERIMENTAL SETUP / p65 (0039.jp2)
- 3.3 RESULTS AND DISCUSSION / p66 (0040.jp2)
- 3.4 CONCLUSIONS / p80 (0047.jp2)
- CHAPTER 4 SPATIAL STRUCTURES OF PLASMAS PRODUCED BY VARIOUS TYPE OF ANTENNAS / p83 (0048.jp2)
- 4.1 INTRODUCTION / p83 (0048.jp2)
- 4.2 SPATIAL STRUCTURES OF PLASMA PRODUCED BY EXTERNAL SPIRAL ANTENNA / p84 (0049.jp2)
- 4.3 SPATIAL STRUCTURES OF PLASMA PRODUCED BY EXTERNAL HELICAL ANTENNA / p95 (0054.jp2)
- 4.4 SPATIAL STRUCTURES OF PLASMA PRODUCED BY A COMBINATION OF HELICAL AND SPIRAL ANTENNAS / p102 (0058.jp2)
- 4.5 SPATIAL STRUCTURES OF ELECTRONEGATIVE PLASMA PRODUCED BY INTERNAL HELICAL ANTENNA IN A UNIFORM MAGNETIC FIELD / p112 (0063.jp2)
- 4.6 CONCLUSION / p127 (0070.jp2)
- CHAPTER 5 DOWNSTREAM CONTROL OF PLASMA PARAMETERS IN HELICON DISCHARGE / p131 (0072.jp2)
- 5.1 INTRODUCTION / p131 (0072.jp2)
- 5.2 EXPERIMENTAL PROCEDURE / p132 (0073.jp2)
- 5.3 DOWNSTREAM CONTROL BY MEANS OF NEGATIVELY BIASED GRID / p136 (0075.jp2)
- 5.4 DOWNSTREAM CONTROL BY VARIOUS PERMANENT MAGNET CONFIGURATIONS / p150 (0082.jp2)
- 5.5 CONCLUSIONS / p157 (0085.jp2)
- CHAPTER 6 POTENTIAL FORMATION NEAR AN ANODE IN AN ELECTRONEGATIVE DC DISCHARGE PLASMA / p160 (0087.jp2)
- 6.1 INTRODUCTION / p160 (0087.jp2)
- 6.2 EXPERIMENTAL PROCEDURE / p161 (0087.jp2)
- 6.3 RESULTS AND DISCUSSION / p163 (0088.jp2)
- 6.4 CONCLUSIONS / p173 (0093.jp2)
- CHAPTER 7 SUMMARY AND SCOPE OF FUTURE RESEARCH / p176 (0095.jp2)
- 7.1 SUMMARY / p176 (0095.jp2)
- 7.2 SCOPE OF FUTURE RESEARCH / p178 (0096.jp2)