Modeling of the microstructure and the optical properties for PVD thin films PVDの薄膜の微細構造モデリング光学動特性

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著者

    • 張, 偉 チョウ, イ

書誌事項

タイトル

Modeling of the microstructure and the optical properties for PVD thin films

タイトル別名

PVDの薄膜の微細構造モデリング光学動特性

著者名

張, 偉

著者別名

チョウ, イ

学位授与大学

東北工業大学

取得学位

博士 (工学)

学位授与番号

乙第2号

学位授与年月日

2000-03-23

注記・抄録

博士論文

目次

  1. Abstract / p1 (0003.jp2)
  2. Contents / p1 (0005.jp2)
  3. Chp.1 Introduction / p1 (0008.jp2)
  4. 1.1 Basic Concept / p1 (0008.jp2)
  5. 1.2 History and Current Situation / p3 (0010.jp2)
  6. 1.3 Problems of Modeling / p12 (0019.jp2)
  7. 1.4 Work and Achievements in this Dissertation / p13 (0020.jp2)
  8. References / p15 (0022.jp2)
  9. Chp.2 The Microstructure Characteristic and the Formation Mechanism of PVD Films / p18 (0025.jp2)
  10. 2.1 Basic Principle of the Physical Vapor Deposition / p18 (0025.jp2)
  11. 2.2 Structure Characteristic of the Vapor-deposited Thin Films / p19 (0026.jp2)
  12. 2.3 Traditional Models and Their Defects for the Microstructure of the Vapor-deposited Thin Films / p22 (0029.jp2)
  13. 2.4 Classical Theory on the Formation of the Thin Films / p24 (0031.jp2)
  14. 2.5 Doctrine on the Growth and the Microstructure / p26 (0033.jp2)
  15. References / p28 (0035.jp2)
  16. Chp.3 Computer Simulation for the Growth and the Structural Properties of the Thin Films / p30 (0037.jp2)
  17. 3.1 Uniformity of the Columnar Structure of the Film vs.the Situation of the Substrate / p30 (0037.jp2)
  18. 3.2 Computer Simulation for the Growth and the Microstructure Properties of the Thin Films / p35 (0042.jp2)
  19. 3.3 Results and Analysis of the Simulation by Computer / p46 (0053.jp2)
  20. 3.4 Comparison between the Models / p48 (0055.jp2)
  21. References / p50 (0057.jp2)
  22. Chp.4 Study of the Modeling for the Microstructure of the Films / p51 (0058.jp2)
  23. 4.1 Introduction / p51 (0058.jp2)
  24. 4.2 Principal Indices in the Traditional Cylinder Models / p51 (0058.jp2)
  25. 4.3 The Ellipsoid Columnar Model and its Three Indices for Real Thin Films / p52 (0059.jp2)
  26. References / p61 (0068.jp2)
  27. Chp.5 Modeling of the Optical Constants for the Thin Films / p62 (0069.jp2)
  28. 5.1 Main Points on the Optical Constants for the Real Films / p62 (0069.jp2)
  29. 5.2 On the Dispersion and Inhomogeneity of the Thin Films / p62 (0069.jp2)
  30. 5.3 The Anisotropy of the Traditional Model for the Thin Films / p65 (0072.jp2)
  31. 5.4 Anisotropy for the Ellipsoid Columnar Model / p72 (0079.jp2)
  32. References / p77 (0084.jp2)
  33. Chp.6 Measurements of the Optical Constants of the Films / p78 (0085.jp2)
  34. 6.1 Scheme of the Measurements / p78 (0085.jp2)
  35. 6.2 Inhomogeneous Dispersion of the Films / p81 (0088.jp2)
  36. 6.3 Anisotropic Dispersion of the Films / p85 (0092.jp2)
  37. 6.4 Anisotropic Indices of the Films / p87 (0094.jp2)
  38. References / p94 (0101.jp2)
  39. Chp.7 Applications of the Modeling for the Optical Thin Films and Systems / p95 (0102.jp2)
  40. 7.1 Introduction / p95 (0102.jp2)
  41. 7.2 More Precise Computation for the Spectral Characteristic of the Optical Thin-film Systems / p96 (0103.jp2)
  42. 7.3 Indirect Problem in the Measurement of the Optical Coatings / p101 (0108.jp2)
  43. 7.4 Processing of the Thin Film with Higher Qualities / p105 (0112.jp2)
  44. References / p111 (0118.jp2)
  45. Chp.8 Conclusion / p112 (0119.jp2)
  46. Acknowledgements / p115 (0122.jp2)
  47. Publications Related to the Research / p116 (0123.jp2)
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各種コード

  • NII論文ID(NAID)
    500000188910
  • NII著者ID(NRID)
    • 8000000189193
  • DOI(NDL)
  • NDL書誌ID
    • 000000353224
  • データ提供元
    • NDL ONLINE
    • NDLデジタルコレクション
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