Modeling of the microstructure and the optical properties for PVD thin films PVDの薄膜の微細構造モデリング光学動特性
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著者
書誌事項
- タイトル
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Modeling of the microstructure and the optical properties for PVD thin films
- タイトル別名
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PVDの薄膜の微細構造モデリング光学動特性
- 著者名
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張, 偉
- 著者別名
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チョウ, イ
- 学位授与大学
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東北工業大学
- 取得学位
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博士 (工学)
- 学位授与番号
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乙第2号
- 学位授与年月日
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2000-03-23
注記・抄録
博士論文
目次
- Abstract / p1 (0003.jp2)
- Contents / p1 (0005.jp2)
- Chp.1 Introduction / p1 (0008.jp2)
- 1.1 Basic Concept / p1 (0008.jp2)
- 1.2 History and Current Situation / p3 (0010.jp2)
- 1.3 Problems of Modeling / p12 (0019.jp2)
- 1.4 Work and Achievements in this Dissertation / p13 (0020.jp2)
- References / p15 (0022.jp2)
- Chp.2 The Microstructure Characteristic and the Formation Mechanism of PVD Films / p18 (0025.jp2)
- 2.1 Basic Principle of the Physical Vapor Deposition / p18 (0025.jp2)
- 2.2 Structure Characteristic of the Vapor-deposited Thin Films / p19 (0026.jp2)
- 2.3 Traditional Models and Their Defects for the Microstructure of the Vapor-deposited Thin Films / p22 (0029.jp2)
- 2.4 Classical Theory on the Formation of the Thin Films / p24 (0031.jp2)
- 2.5 Doctrine on the Growth and the Microstructure / p26 (0033.jp2)
- References / p28 (0035.jp2)
- Chp.3 Computer Simulation for the Growth and the Structural Properties of the Thin Films / p30 (0037.jp2)
- 3.1 Uniformity of the Columnar Structure of the Film vs.the Situation of the Substrate / p30 (0037.jp2)
- 3.2 Computer Simulation for the Growth and the Microstructure Properties of the Thin Films / p35 (0042.jp2)
- 3.3 Results and Analysis of the Simulation by Computer / p46 (0053.jp2)
- 3.4 Comparison between the Models / p48 (0055.jp2)
- References / p50 (0057.jp2)
- Chp.4 Study of the Modeling for the Microstructure of the Films / p51 (0058.jp2)
- 4.1 Introduction / p51 (0058.jp2)
- 4.2 Principal Indices in the Traditional Cylinder Models / p51 (0058.jp2)
- 4.3 The Ellipsoid Columnar Model and its Three Indices for Real Thin Films / p52 (0059.jp2)
- References / p61 (0068.jp2)
- Chp.5 Modeling of the Optical Constants for the Thin Films / p62 (0069.jp2)
- 5.1 Main Points on the Optical Constants for the Real Films / p62 (0069.jp2)
- 5.2 On the Dispersion and Inhomogeneity of the Thin Films / p62 (0069.jp2)
- 5.3 The Anisotropy of the Traditional Model for the Thin Films / p65 (0072.jp2)
- 5.4 Anisotropy for the Ellipsoid Columnar Model / p72 (0079.jp2)
- References / p77 (0084.jp2)
- Chp.6 Measurements of the Optical Constants of the Films / p78 (0085.jp2)
- 6.1 Scheme of the Measurements / p78 (0085.jp2)
- 6.2 Inhomogeneous Dispersion of the Films / p81 (0088.jp2)
- 6.3 Anisotropic Dispersion of the Films / p85 (0092.jp2)
- 6.4 Anisotropic Indices of the Films / p87 (0094.jp2)
- References / p94 (0101.jp2)
- Chp.7 Applications of the Modeling for the Optical Thin Films and Systems / p95 (0102.jp2)
- 7.1 Introduction / p95 (0102.jp2)
- 7.2 More Precise Computation for the Spectral Characteristic of the Optical Thin-film Systems / p96 (0103.jp2)
- 7.3 Indirect Problem in the Measurement of the Optical Coatings / p101 (0108.jp2)
- 7.4 Processing of the Thin Film with Higher Qualities / p105 (0112.jp2)
- References / p111 (0118.jp2)
- Chp.8 Conclusion / p112 (0119.jp2)
- Acknowledgements / p115 (0122.jp2)
- Publications Related to the Research / p116 (0123.jp2)