Mechanical Properties of Thin Films : Ultramicroin-dentation Hardness, Young's Modulus and Internal Stress

• TSUKAMOTO Y.

収録刊行物

• Thin Solid Films

  Thin Solid Films 154 (1), 171-181, 1987

詳細情報

• CRID: 1573105976475085056
• NII論文ID: 80003851961
• データソース種別:
  • CiNii Articles