Effect of buoyancy forces and reactor orientation of fluid flow and growth rate uniformity in coldwall channel CVD reactors

• HOLSTEIN W. L.

収録刊行物

• J. Crystal Growth

  J. Crystal Growth 94 145-158, 1989

詳細情報

• CRID: 1572824501509075712
• NII論文ID: 80004456644
• データソース種別:
  • CiNii Articles