Modeling of Materials Synthesis in Hybrid Plasma Reactors : Production of Silicon by Thermal Decomposition of SiCl_4

• MCKELLIGET J. W.

Journal

• Metallurgical Trans., B

  Metallurgical Trans., B 21 589-600, 1990

Details

• CRID: 1570291226735633920
• NII Article ID: 80005251610
• Data Source:
  • CiNii Articles