Off-axis laser deposition of YBa2Cu3O7−δ thin films

• B. Holzapfel

  Siemens AG, Research Laboratories, P.O. Box 3220, D-8520 Erlangen, Germany

• B. Roas

  Siemens AG, Research Laboratories, P.O. 3220, D-8520 Erlangen, Germany

• L. Schultz

  Siemens AG, Research Laboratories, P.O. 3220, D-8520 Erlangen, Germany

• P. Bauer

  Institute of Physics, University of Erlangen, Erwin-Rommel Strasse, D-8520 Erlangen, Germany

• G. Saemann-Ischenko

  Institute of Physics, University of Erlangen, Erwin-Rommel Strasse, D-8520 Erlangen, Germany

抄録

We report on YBa2Cu3O7−δ thin-film preparation by a new laser deposition geometry, the so-called off-axis laser deposition. Combined with radiation-based substrate heating, this results in c-axis oriented, epitaxial YBa2Cu3O7−δ thin films with critical current densities above 106 A/cm2 at 77 K and zero field and an exceptionally good surface quality, with complete absence of the otherwise observed laser droplets. As proved by atomic force microscopy, the surface roughness is <80 Å over an area of at least 10×10 μm2. Using this off-axis geometry it is possible to coat both sides of a substrate simultaneously, providing a one-step process in double-sided thin-film deposition. Both YBa2Cu3O7−δ films on the substrate show identical superconducting properties.

収録刊行物

• Applied Physics Letters

  Applied Physics Letters 61 (26), 3178-3180, 1992-12-28

  AIP Publishing

キーワード

• Physics and Astronomy (miscellaneous)

詳細情報

• CRID: 1362262945606959232
• NII論文ID: 80006864866
• DOI: 10.1063/1.107951
• ISSN: 10773118
• ISSN: 00036951
• Web Site: https://pubs.aip.org/aip/apl/article-pdf/61/26/3178/18492950/3178_1_online.pdf
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