Optical characterizations of photo-induced chemical vapor deposition produced SiO_2 films in vacuum ultraviolet, ultraviolet, and visible region

• KANASHIMA T.

収録刊行物

• J. App. Phys.

  J. App. Phys. 74 (9), 5742-5747, 1993

詳細情報

• CRID: 1571417126651740928
• NII論文ID: 80007322463
• データソース種別:
  • CiNii Articles