Novel in situ Method to Detect Subnanometer-Sized Particles in Plasmas and its Application to Particles in Helium-Diluted Silane Radio Frequency Plasmas

• FUKUZAWA T.

収録刊行物

• Appl. Phys. Lett.

  Appl. Phys. Lett. 64 3098-3100, 1994

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• CRID: 1570009751762175872
• NII論文ID: 80007660243
• データソース種別:
  • CiNii Articles