Viscous damping model for laterally oscillating microstructures
収録刊行物
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- Journal of Microelectromechanical Systems
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Journal of Microelectromechanical Systems 3 (2), 81-87, 1994
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詳細情報
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- CRID
- 1570291226744532352
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- NII論文ID
- 80007694795
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- データソース種別
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- CiNii Articles