Simulation of anisotropic chemical etching of crystalline silicon using a cellular automata model

• THAN O.

収録刊行物

• Sensors and Actuators

  Sensors and Actuators 45 885-889, 1994

詳細情報

• CRID: 1570854176699831168
• NII論文ID: 80007894325
• データソース種別:
  • CiNii Articles