Study of the Oxidation of Aluminum Nitride Coatings at High Temperature

Author(s)

Journal

  • Thin Solid Films

    Thin Solid Films 260(Issue 1), 38-46, 1995

Cited by:  1

Codes

  • NII Article ID (NAID)
    80008274349
  • Article Type
    Journal Article
  • Data Source
    CJPref 
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