Fabrication of double-gated Si field emitter arrays for focused electron beam generation

• ITOH J.

収録刊行物

• J.Vac.Sci.Technol.

  J.Vac.Sci.Technol. 13 (5), 1968-1972, 1995

詳細情報

• CRID: 1570854176715278976
• NII論文ID: 80008593204
• NII書誌ID: AA10635514
• データソース種別:
  • CiNii Articles