Influence of ion-implantation on native oxidation of Si in a clean-room atmosphere

Author(s)

Journal

  • Applied Surface Science

    Applied Surface Science 100/101, 138-142, 1996

Cited by:  1

Codes

  • NII Article ID (NAID)
    80009165962
  • Article Type
    Journal Article
  • Data Source
    CJPref 
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