Analysis and Decomposition of Spatial Variation in Integrated Circuit Processes and Devices

• STINE B. E.

Journal

• IEEE Trans. on Semiconductor Manufacturing

  IEEE Trans. on Semiconductor Manufacturing 10 24-41, 1997

Details

• CRID: 1572543025696208768
• NII Article ID: 80009514133
• Data Source:
  • CiNii Articles