A new system for two-dimensional analysis of hydrogen on solid surfaces

• K. Ishikawa

  Toyota Technological Institute, Hisakata 2-chome, Tempaku-ku, Nagoya 468, Japan

• M. Yoshimura

  Toyota Technological Institute, Hisakata 2-chome, Tempaku-ku, Nagoya 468, Japan

• K. Ueda

  Toyota Technological Institute, Hisakata 2-chome, Tempaku-ku, Nagoya 468, Japan

• Y. Sakai

  Research and Development Department, JEOL Ltd., Musashino 3-chome, Akishima, Tokyo 196, Japan

抄録

This article reports the development of a two-dimensional analyzer, which enables us to observe the distribution of hydrogen on surfaces. A micro-focused electron beam with low primary electron energy (<1 keV) is scanned over a sample surface, in conjunction with a time-of-flight type electron-stimulated desorption spectroscope, to obtain clear H+ ion images of a specimen surface. A line scan analysis of H+ ions on an integrated circuit and a scanning electron-stimulated desorption image of H+ ions on a Cu mesh are presented as demonstrations.

収録刊行物

• Review of Scientific Instruments

  Review of Scientific Instruments 68 (11), 4103-4106, 1997-11-01

  AIP Publishing

キーワード

• Instrumentation

詳細情報

• CRID: 1363670318919171072
• NII論文ID: 80009964356
• DOI: 10.1063/1.1148353
• ISSN: 10897623
• ISSN: 00346748
• Web Site: https://pubs.aip.org/aip/rsi/article-pdf/68/11/4103/19277227/4103_1_online.pdf
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