The Effects of Oxidation Temperature on Capacitance-Voltage Characteristics of Oxidized AlN Films on Si

Author(s)

Journal

  • Applied Physics Letters

    Applied Physics Letters 71(26), 3802-3804, 1997

Cited by:  1

Codes

  • NII Article ID (NAID)
    80010089453
  • Article Type
    Journal Article
  • Data Source
    CJPref 
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