Fabrication of silicon and metal nanowires and dots using mechanical atomic force lithography

• HU S.

Journal

• J. Vac. Sci. Technol. B

  J. Vac. Sci. Technol. B 16 2822-, 1998

Details

• CRID: 1571980076641678592
• NII Article ID: 80010607401
• Data Source:
  • CiNii Articles