Measurements of the effective transe piezoelectric coefficient e_<31,f> of AlN and Pb(Zr_x,Ti_<1-x>)O_3 thin films

• DUBOIS Marc-alexandre

Journal

• Sensors and Actuators

  Sensors and Actuators 77 106-112, 1999

Details

• CRID: 1572261551610366720
• NII Article ID: 80010751613
• NII Book ID: AA1078104X
• Data Source:
  • CiNii Articles